PROCESS FOR MAKING A PARYLENE COATING

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(11)

EP 0 934 127 A1

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(43)	Date of publication:
	11.08.1999 Bulletin 1999/32

(21)	Application number: 97913758.0

(22)	Date of filing: 24.10.1997

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International Patent Classification (IPC):

C08J 7/ 16^{( . )}
B05D 7/ 24^{( . )}
C08G 61/ 10^{( . )}
H01L 21/ 312^{( . )}

B05D 3/ 14^{( . )}
B32B 27/ 00^{( . )}
C23C 14/ 12^{( . )}

(86)	International application number:
	PCT/US1997/019294

(87)	International publication number:
	WO 1998/018570 (07.05.1998 Gazette 1998/18)

(84)	Designated Contracting States:
	DE FR GB NL

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Priority:

25.10.1996 US 19960738319
12.09.1997 US 19970928931

(71)	Applicant: SPECIALTY COATING SYSTEMS, INC.
	Indianapolis, Indiana 46241 (US)

(72)	Inventors:
	WARY, John Noblesville, IN 46060 (US) OLSON, Roger, A. Amery, WI 54001 (US) BEACH, William, F. Bridgewater, NJ 08807 (US)

(74)	Representative: Allard, Susan Joyce, et al
	BOULT WADE TENNANT, 27 Furnival Street London EC4A 1PQ London EC4A 1PQ (GB)

(54)	PROCESS FOR MAKING A PARYLENE COATING