(19)

(11)

EP 0 953 202 A1

(12)

(43) Date of publication: 03.11.1999 Bulletin 1999/44 (21) Application number: 98965162.0 (22) Date of filing: 17.11.1998

(51) International Patent Classification (IPC):  H01J 37/ 04( . ) H01J 37/ 28( . ) (86) International application number: PCT/EP1998/007381 (87) International publication number: WO 1999/026272 (27.05.1999 Gazette 1999/21)

(84) Designated Contracting States: DE FR GB NL (30) Priority: 17.11.1997 EP 19970120124 (71) Applicant: ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH 85551 Heimstetten (DE)	(72) Inventors: FEUERBAUM, Hans-Peter D-81739 Munich (DE) WINKLER, Dieter D-81739 Munich (DE) DEGENHARDT, Ralf D-85609 Aschheim (DE) MUNACK, Harry D-85551 Heimstetten (DE) (74) Representative: Zimmermann, Gerd Heinrich, et al  Diehl Glaeser Hiltl & Partner, Patentanwälte, Augustenstrasse 46 80333 München 80333 München (DE)