(19)

(11)

EP 0 953 213 A2

(12)

(43) Date of publication: 03.11.1999 Bulletin 1999/44 (21) Application number: 97949443.0 (22) Date of filing: 10.11.1997

(51) International Patent Classification (IPC):  H01L 21/ 3205( . ) G02F 1/ 1345( . ) H01L 21/ 288( . ) H01L 23/ 52( . ) H01L 29/ 43( . ) H01L 29/ 49( . ) H01L 31/ 10( . ) H01L 33/ 40( . ) H01L 51/ 05( . ) H01L 51/ 50( . ) H05B 33/ 12( . ) H05B 33/ 26( . ) G02F 1/ 1343( . ) H01L 21/ 28( . ) H01L 21/ 58( . ) H01L 27/ 148( . ) H01L 29/ 45( . ) H01L 29/ 786( . ) H01L 33/ 38( . ) H01L 33/ 42( . ) H01L 51/ 40( . ) H01L 51/ 52( . ) H05B 33/ 14( . ) (86) International application number: PCT/US1997/020862 (87) International publication number: WO 1998/021755 (22.05.1998 Gazette 1998/20)

(84) Designated Contracting States: CH DE ES FR GB IE IT LI NL SE (30) Priority: 12.11.1996 US 19960030501P 07.03.1997 US 19970040129P 07.03.1997 US 19970040130P 07.03.1997 US 19970040131P 07.03.1997 US 19970040132P 07.03.1997 US 19970040159P 07.03.1997 US 19970040335P 07.03.1997 US 19970040628P (71) Applicant: International Business Machines Corporation Armonk, N.Y. 10504 (US)

(72) Inventors: ANGELOPOULOS, Marie Cortlandt Manor, NY 10566 (US) DIMITRAKOPOULOS, Christos, Dimitrios West Harrison, NY 10604-1606 (US) FURMAN, Bruce, Kenneth Williston, VT 05495 (US) GRAHAM, Teresita, Ordonez Irvington, NY 10533 (US) LIEN, Shui-Chih, Alan Briarcliff Manor, NY 10510 (US) (74) Representative: Davies, Simon Robert  IBM, United Kingdom Limited, Intellectual Property Law, Hursley Park Winchester, Hampshire SO21 2JN Winchester, Hampshire SO21 2JN (GB)