(19)
(11) EP 0 954 366 A1

(12)

(43) Date of publication:
10.11.1999 Bulletin 1999/45

(21) Application number: 97952695.0

(22) Date of filing: 31.12.1997
(51) International Patent Classification (IPC): 
B01D 45/ 00( . )
B01J 4/ 00( . )
B01J 8/ 00( . )
B01J 8/ 22( . )
B01J 19/ 26( . )
C30B 25/ 14( . )
 B01D 53/ 14( . )
B01J 4/ 04( . )
B01J 8/ 20( . )
B01J 19/ 00( . )
C23C 16/ 44( . )
(86) International application number:
PCT/US1997/024275
(87) International publication number:
WO 1998/029178 (09.07.1998 Gazette 1998/27)
(84) Designated Contracting States:
AT BE CH DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

(30) Priority: 31.12.1996 US 19960778386
31.12.1996 US 19960778396
16.05.1997 US 19970857448
06.06.1997 US 19970870705

(71) Applicant: ATMI ECOSYS CORPORATION
San Jose, CA 95134-1907 (US)

(72) Inventors:
  • HOLST, Mark, R.
    Concord, CA 94518 (US)
  • CARPENTER, Kent
    Stamford, CT 06903 (US)
  • LANE, Scott
    Chandler, AZ 85224 (US)
  • ARYA, Prakash, V.
    Cranston, RI 02905 (US)
  • BALLIEW, Patrick
    Ft. Collins, CO 80525 (US)
  • SWEENEY, Joseph, D.
    San Francisco, CA 94112 (US)

(74) Representative: Schüssler, Andrea, Dr. 
Kanzlei Huber & Schüssler Truderinger Strasse 246
81825 München
81825 München (DE)

   


(54) INLET STRUCTURES FOR INTRODUCING A PARTICULATE SOLIDS-CONTAINING AND/OR SOLIDS-FORMING GAS STREAM TO A GAS PROCESSING SYSTEM