(19)

(11)

EP 0 954 408 A1

(12)

(43) Date of publication: 10.11.1999 Bulletin 1999/45 (21) Application number: 98954788.0 (22) Date of filing: 20.11.1998

(51) International Patent Classification (IPC):  B08B 1/ 04( . ) H01L 21/ 306( . ) B24B 37/ 04( . ) (86) International application number: PCT/JP1998/005253 (87) International publication number: WO 1999/026761 (03.06.1999 Gazette 1999/22)

(84) Designated Contracting States: DE FR (30) Priority: 21.11.1997 JP 19970338032 (71) Applicant: EBARA CORPORATION Ohta-ku, Tokyo 144-8510 (JP)	(72) Inventors: SHIMIZU, Noburu Yokohama-shi Kanagawa 223-0053 (JP) KIMURA, Norio Fujisawa-shi Kanagawa 251-0021 (JP) (74) Representative: Wagner, Karl H., Dipl.-Ing.  WAGNER & GEYER Patentanwälte Gewürzmühlstrasse 5 80538 München 80538 München (DE)