REACTIVE MAGNETRON SPUTTERING APPARATUS AND METHOD - Patent 0956375

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EP 0 956 375 A1

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(43)	Date of publication:
	17.11.1999 Bulletin 1999/46

(21)	Application number: 96918398.0

(22)	Date of filing: 10.06.1996

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International Patent Classification (IPC):

C23C 14/ 35^{( . )}
C23C 14/ 34^{( . )}

C23C 14/ 00^{( . )}
H01J 37/ 34^{( . )}

(86)	International application number:
	PCT/US1996/009742

(87)	International publication number:
	WO 1997/047781 (18.12.1997 Gazette 1998/02)

(84)	Designated Contracting States:
	DE ES FR GB IE IT SE

(71)	Applicant: Corning Oca Corporation
	Marlborough, MA 01752 (US)

(72)	Inventor:
	SCOBEY, Michael, A. Marlborough, MA 01752 (US)

(74)	Representative: Ertl, Nicholas Justin, et al
	Elkington and Fife, Prospect House, 8 Pembroke Road Sevenoaks, Kent TN13 1XR Sevenoaks, Kent TN13 1XR (GB)

(54)	REACTIVE MAGNETRON SPUTTERING APPARATUS AND METHOD