(19)
(11)
EP 0 956 381 A1
(12)
(43)
Date of publication:
17.11.1999
Bulletin 1999/46
(21)
Application number:
97904246.0
(22)
Date of filing:
31.01.1997
(51)
International Patent Classification (IPC):
C30B
29/
36
( . )
C30B
23/
00
( . )
(86)
International application number:
PCT/US1997/001864
(87)
International publication number:
WO 1998/033961
(
06.08.1998
Gazette 1998/31)
(84)
Designated Contracting States:
AT BE CH DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE
(71)
Applicant:
NORTHROP GRUMMAN CORPORATION
Los Angeles, California 90067-2199 (US)
(72)
Inventors:
BARRETT, Donovan, L.
Pittsburgh, PA 15235 (US)
SEIDENSTICKER, Raymond, G.
Pittsburgh, PA 15221 (US)
HOPKINS, Richard, H.
Export, PA 15632 (US)
(74)
Representative:
O'Reilly, Peter Andrew
Albihns GmbH, Grasserstrasse 10
80339 München
80339 München (DE)
(54)
APPARATUS FOR GROWING LARGE SILICON CARBIDE SINGLE CRYSTALS