SCREENING OXIDE FOR SOURCE AND DRAIN REGIONS FORMED FROM SOLID DOPANT SOURCE - Patent 0958596

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EP 0 958 596 A1

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(43)	Date of publication:
	24.11.1999 Bulletin 1999/47

(21)	Application number: 97933371.0

(22)	Date of filing: 10.07.1997

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International Patent Classification (IPC):

H01L 21/ 28^{( . )}
H01L 21/ 8238^{( . )}
H01L 29/ 78^{( . )}

H01L 21/ 225^{( . )}
H01L 27/ 092^{( . )}

(86)	International application number:
	PCT/US1997/012052

(87)	International publication number:
	WO 1998/013861 (02.04.1998 Gazette 1998/13)

(84)	Designated Contracting States:
	DE IE

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Priority:

24.09.1996 US 19960716772

(71)	Applicant: INTEL CORPORATION
	Santa Clara, CA 95052 (US)

(72)	Inventor:
	ANDIDEH, Ebrahim Portland, OR 97229 (US)

(74)	Representative: Molyneaux, Martyn William, et al
	Langner Parry 52-54 High Holborn London WC1V 6RR London WC1V 6RR (GB)

(54)	SCREENING OXIDE FOR SOURCE AND DRAIN REGIONS FORMED FROM SOLID DOPANT SOURCE