(19)

(11)

EP 0 958 615 A1

(12)

(43) Date of publication: 24.11.1999 Bulletin 1999/47 (21) Application number: 97934785.0 (22) Date of filing: 30.07.1997

(51) International Patent Classification (IPC):  H01L 31/ 04( . ) H01L 31/ 075( . ) H01L 31/ 0352( . ) (86) International application number: PCT/NL1997/000446 (87) International publication number: WO 1998/005077 (05.02.1998 Gazette 1998/05)

(84) Designated Contracting States: CH DE FR GB IT LI NL (30) Priority: 30.07.1996 NL 19961003705 (71) Applicant: TECHNISCHE UNIVERSITEIT DELFT 2600 AA Delft (NL)	(72) Inventors: METSELAAR, Jan, Willem NL-1431 WP Aalsmeer (NL) KUZNETSOV, Vladimir, Iwanovich NL-2622 AX Delft (NL) (74) Representative: de Bruijn, Leendert C., et al  Nederlandsch Octrooibureau P.O. Box 29720 2502 LS Den Haag 2502 LS Den Haag (NL)