(19)

(11)

EP 0 958 649 A2

(12)

(43) Date of publication: 24.11.1999 Bulletin 1999/47 (21) Application number: 97923449.0 (22) Date of filing: 17.04.1997

(51) International Patent Classification (IPC):  H01L 41/ 09( . ) H02N 2/ 16( . ) (86) International application number: PCT/US1997/006871 (87) International publication number: WO 1997/039520 (23.10.1997 Gazette 1997/45)

(84) Designated Contracting States: DE FR GB NL (30) Priority: 17.04.1996 US 19960633650 (71) Applicant: CALIFORNIA INSTITUTE OF TECHNOLOGY Pasadena California 91125 (US)	(72) Inventors: BAR-COHEN, Yoseph Seal Beach, CA 90740 (US) LIH, Shyh-Shiuh Chatsworth, CA 91311 (US) GRANDIA, Willem, A. Costa Mesa, CA 92627 (US) (74) Representative: Goodman, Christopher  Eric Potter Clarkson, Park View House, 58 The Ropewalk Nottingham NG1 5DD Nottingham NG1 5DD (GB)