(19)
(11) EP 0 959 150 B8

(12) CORRECTED EUROPEAN PATENT SPECIFICATION
Note: Bibliography reflects the latest situation

(15) Correction information:
Corrected version no 1 (W1 B1)

(48) Corrigendum issued on:
18.01.2006 Bulletin 2006/03

(45) Mention of the grant of the patent:
05.10.2005 Bulletin 2005/40

(21) Application number: 99303880.1

(22) Date of filing: 18.05.1999
(51) International Patent Classification (IPC): 
C23C 16/44(1985.01)
C23C 16/455(2000.01)
 H01L 21/00(1974.07)

(54)

Apparatus for depositing thin films

Vorrichtung zur Herstellung von Dünnfilmen

Appareil de production de couches minces

(84) Designated Contracting States:
DE FR GB

(30) Priority: 18.05.1998 KR 9817858

(43) Date of publication of application:
24.11.1999 Bulletin 1999/47

(73) Proprietor: IPS Ltd
Pyungtaek-si, Kyungki-do (KR)

(72) Inventors:
  • Choi, Won-sung
    Pyungtaek-si, Kyungki-do (KR)
  • Oh, Kyu-un
    Pyungtaek-si, Kyungki-do (KR)

(74) Representative: Hutchinson, Glenn Stanley et al
Harrison Goddard Foote, Fountain Precinct Balm Green
Sheffield S1 2JA
Sheffield S1 2JA (GB)


(56) References cited: : 
EP-A- 0 272 140
EP-A- 0 854 210
US-A- 5 338 363
 EP-A- 0 678 903
US-A- 4 962 727
US-A- 5 558 717
   
       
    Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).