METHODS AND APPARATUS FOR INTEGRATING OPTICAL AND INTERFEROMETRIC LITHOGRAPHY TO PRODUCE COMPLEX PATTERNS - Patent 0960356

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EP 0 960 356 A1

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(43)	Date of publication:
	01.12.1999 Bulletin 1999/48

(21)	Application number: 98904595.0

(22)	Date of filing: 21.01.1998

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International Patent Classification (IPC):

G03F 7/ 20^{( . )}

H01L 21/ 027^{( . )}

(86)	International application number:
	PCT/US1998/000992

(87)	International publication number:
	WO 1998/032054 (23.07.1998 Gazette 1998/29)

(84)	Designated Contracting States:
	DE GB NL

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Priority:

21.01.1997 US 19970786066

(71)	Applicant: The University of New Mexico
	Albuquerque, NM (US)

(72)	Inventors:
	BRUECK, S., R., J. Albuquerque, NM 87111 (US) CHEN, Xiaolan Albuquerque, NM 87100 (US) FRAUENGLASS, Andrew Albuquerque, NM 87106 (US) ZAIDI, Saleem, H. Albuquerque, NM 87111 (US)

(74)	Representative: Hanna, Peter William Derek, et al
	Tomkins & Co., 5 Dartmouth Road Dublin 6 Dublin 6 (IE)

(54)	METHODS AND APPARATUS FOR INTEGRATING OPTICAL AND INTERFEROMETRIC LITHOGRAPHY TO PRODUCE COMPLEX PATTERNS