(19)
(11) EP 0 960 693 A3

(12) EUROPEAN PATENT APPLICATION

(88) Date of publication A3:
04.09.2002 Bulletin 2002/36

(43) Date of publication A2:
01.12.1999 Bulletin 1999/48

(21) Application number: 99109243.8

(22) Date of filing: 25.05.1999
(51) International Patent Classification (IPC)7: B24B 37/04, B24D 13/12, B24D 13/14
(84) Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE
Designated Extension States:
AL LT LV MK RO SI

(30) Priority: 28.05.1998 JP 14715998

(71) Applicant: Speedfam Co., Ltd.
Kanagawa 252-1123 (JP)

(72) Inventor:
  • Nagayama, Hitoshi, c/o Speedfam Co., Ltd.
    Ayase-city, Kanagawa-pref 252-1123 (JP)

(74) Representative: Weisert, Annekäte, Dipl.-Ing. Dr.-Ing. et al
Patentanwälte Kraus & Weisert Thomas-Wimmer-Ring 15
80539 München
80539 München (DE)

   


(54) A polishing machine


(57) The present invention is a polishing machine, comprising a rotatable metallic platen whose surface is covered by the plural number of polishing pad, on the position of the surface of said metallic platen corresponding to the jointing lines of said polishing pads, the grooves are engraved, and the filling material which is different from the material composing the platen is inserted into said grooves. The desirable substance to be inserted into said grooves is stainless steel, synthetic resin or ceramics.






Search report