(19)

(11)

EP 0 962 028 A1

(12)

(43) Date of publication: 08.12.1999 Bulletin 1999/49 (21) Application number: 98906121.0 (22) Date of filing: 05.02.1998

(51) International Patent Classification (IPC):  G01F 17/ 00( . ) H01L 21/ 02( . ) H01L 21/ 00( . ) (86) International application number: PCT/US1998/002105 (87) International publication number: WO 1998/037574 (27.08.1998 Gazette 1998/34)

(84) Designated Contracting States: AT BE CH DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE (30) Priority: 21.02.1997 US 19970803913 (71) Applicant: Speedline Technologies, Inc. Franklin, MA 02038 (US)	(72) Inventors: CARR, Gregory, L. Newburyport, MA 01950 (US) CAVALLARO, William Bradford, MA 01835 (US) LIENHARD, John Lexington, MA 02173 (US) (74) Representative: Bayliss, Geoffrey Cyril, et al  BOULT WADE TENNANT, 27 Furnival Street London EC4A 1PQ London EC4A 1PQ (GB)