(19)
(11) EP 0 964 440 B8

(12) CORRECTED EUROPEAN PATENT SPECIFICATION
Note: Bibliography reflects the latest situation

(15) Correction information:
Corrected version no 1 (W1 B1)

(48) Corrigendum issued on:
16.02.2011 Bulletin 2011/07

(45) Mention of the grant of the patent:
18.08.2010 Bulletin 2010/33

(21) Application number: 99111440.6

(22) Date of filing: 11.06.1999
(51) International Patent Classification (IPC): 
H01L 21/027(2006.01)
B41J 2/16(2006.01)
 H01L 21/308(2006.01)
H01L 21/311(2006.01)

(54)

Etching method for processing substrate, dry etching method for polyetheramide resin layer, production method of ink-jet printing head, ink-jet head and ink-jet printing apparatus

Ätzverfahren zur Behandlung eines Substrates, Trockenätzverfahren für eine Polyetheramid-Harzschicht, Herstellungsverfahren für einen Tintenstrahl-Druckkopf, Tintenstrahlkopf und Tintenstrahl-Druckvorrichtung

Procédé de gravure pour le traitement d'un substrat, procédé de gravure sèche pour couche de résine polyéthéramide, procédé de production d'une tête d'impression à jet d'encre, tête à jet d'encre et dispositif d'impression à jet d'encre

(84) Designated Contracting States:
DE ES FR GB IT NL

(30) Priority: 11.06.1998 JP 16394098

(43) Date of publication of application:
15.12.1999 Bulletin 1999/50

(73) Proprietor: CANON KABUSHIKI KAISHA
Ohta-ku Tokyo (JP)

(72) Inventors:
  • Kobayashi, Junichi
    Ohta-ku, Tokyo (JP)
  • Ohkuma, Norio
    Ohta-ku, Tokyo (JP)
  • Murakami, Keiichi
    Ohta-ku, Tokyo (JP)
  • Sato, Tamaki
    Ohta-ku, Tokyo (JP)

(74) Representative: Weser, Wolfgang 
Weser & Kollegen Patentanwälte Radeckestrasse 43
81245 München
81245 München (DE)


(56) References cited: : 
EP-A- 0 827 032
EP-A- 0 962 320
 EP-A- 0 841 167
   
  • PATENT ABSTRACTS OF JAPAN vol. 011, no. 329 (E-552), 27 October 1987 (1987-10-27) & JP 62 117331 A (HITACHI CHEM CO LTD;OTHERS: 02), 28 May 1987 (1987-05-28)
  • PATENT ABSTRACTS OF JAPAN vol. 005, no. 099 (E-063), 26 June 1981 (1981-06-26) & JP 56 043728 A (FUJITSU LTD), 22 April 1981 (1981-04-22)
   
Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).