MANUFACTURE OF A SEMICONDUCTOR DEVICE WITH A POLY-EMITTER BIPOLAR TRANSISTOR - Patent 0965144

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EP 0 965 144 A2

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(43)	Date of publication:
	22.12.1999 Bulletin 1999/51

(21)	Application number: 98946665.0

(22)	Date of filing: 19.10.1998

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International Patent Classification (IPC):

H01L 21/ 28^{( . )}
H01L 21/ 60^{( . )}
H01L 21/ 8248^{( . )}
H01L 27/ 06^{( . )}

H01L 21/ 331^{( . )}
H01L 21/ 8222^{( . )}
H01L 21/ 8249^{( . )}
H01L 29/ 73^{( . )}

(86)	International application number:
	PCT/IB1998/001654

(87)	International publication number:
	WO 1999/025003 (20.05.1999 Gazette 1999/20)

(84)	Designated Contracting States:
	DE FR GB IT NL

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Priority:

12.11.1997 EP 19970203518

(71)	Applicant: Koninklijke Philips Electronics N.V.
	5621 BA Eindhoven (NL)

(72)	Inventors:
	VAN DER MEER, Hendrik, Hubertus NL-5656 AA Eindhoven (NL) MURPHY, William, Mark NL-5656 AA Eindhoven (NL) PETERS, W., C., M. NL-5656 AA Eindhoven (NL) POSTMA, Fokke NL-5656 AA Eindhoven (NL)

(74)	Representative: Duijvestijn, Adrianus Johannes
	Internationaal Octrooibureau B.V., Prof. Holstlaan 6 5656 AA Eindhoven 5656 AA Eindhoven (NL)

(54)	MANUFACTURE OF A SEMICONDUCTOR DEVICE WITH A POLY-EMITTER BIPOLAR TRANSISTOR