(19)

(11)

EP 0 966 421 A2

(12)

(43) Date of publication: 29.12.1999 Bulletin 1999/52 (21) Application number: 97951629.0 (22) Date of filing: 08.12.1997

(51) International Patent Classification (IPC):  C07C 51/ 42( . ) C07C 51/ 47( . ) C07C 59/ 265( . ) C07C 51/ 41( . ) C07C 55/ 06( . ) H01L 21/ 304( . ) (86) International application number: PCT/US1997/022736 (87) International publication number: WO 1998/026449 (18.06.1998 Gazette 1998/24)

(84) Designated Contracting States: BE DE ES FR GB IT NL (30) Priority: 09.12.1996 US 19960032588P (71) Applicant: ASHLAND INC. Columbus, OH 43216 (US)	(72) Inventor: HACKETT, Thomas, B. Columbus, OH 43235 (US) (74) Representative: VOSSIUS & PARTNER  Siebertstrasse 4 81675 München 81675 München (DE)