(19)
(11) EP 0 968 318 A1

(12)

(43) Date of publication:
05.01.2000 Bulletin 2000/01

(21) Application number: 98958522.9

(22) Date of filing: 10.11.1998
(51) International Patent Classification (IPC)7: C23C 14/34
(86) International application number:
PCT/US9823/968
(87) International publication number:
WO 9927/151 (03.06.1999 Gazette 1999/22)
(84) Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

(30) Priority: 24.11.1997 US 66695 P
08.09.1998 US 149234

(71) Applicant: CVC, Inc.
Rochester, NY 14606 (US)

(72) Inventors:
  • PARANJPE, Ajit
    Sunnyvale, CA 94086 (US)
  • BUBBER, Randhir
    San Ramon, CA 94583 (US)
  • SCHWARTZ, Peter
    Fremont, CA 94536 (US)
  • NAGPAL, Rajesh
    Fremont, CA 94538 (US)

(74) Representative: Fiener, Josef 
Postfach 12 49
87712 Mindelheim
87712 Mindelheim (DE)

   


(54) PULSED MODE DEPOSITION FOR LOW RATE FILM DEPOSITION