(19)
(11) EP 0 968 511 A1

(12)

(43) Date of publication:
05.01.2000 Bulletin 2000/01

(21) Application number: 98937697.5

(22) Date of filing: 19.08.1998
(51) International Patent Classification (IPC)7H01J 9/227, H01J 9/22
(86) International application number:
PCT/IB9801/273
(87) International publication number:
WO 9917/328 (08.04.1999 Gazette 1999/14)
(84) Designated Contracting States:
DE FR GB

(30) Priority: 29.09.1997 EP 97202976

(71) Applicant: Koninklijke Philips Electronics N.V.
5621 BA Eindhoven (NL)

(72) Inventors:
  • BEERENS, Marinus, Nicolaas, Maria
    NL-5656 AA Eindhoven (NL)
  • GEHRING, Frederic, Christiaan
    NL-5656 AA Eindhoven (NL)
  • THEELEN, Gerardus, Wilhelmus, Maria
    NL-5656 AA Eindhoven (NL)
  • VAN MARREWIJK, Richard, Nicolaas
    NL-5656 AA Eindhoven (NL)

(74) Representative: Koppen, Jan 
INTERNATIONAAL OCTROOIBUREAU B.V.,Prof. Holstlaan 6
5656 AA Eindhoven
5656 AA Eindhoven (NL)

   


(54) METHOD AND APPARATUS FOR APPLYING A COATING