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(11)

EP 0 970 261 A1

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(43) Date of publication: 12.01.2000 Bulletin 2000/02 (21) Application number: 98912942.4 (22) Date of filing: 17.03.1998

(51) International Patent Classification (IPC)7: C23C 14/35, H01J 37/34 (86) International application number: PCT/US9805/143 (87) International publication number: WO 9842/890 (01.10.1998 Gazette 1998/39)

(84) Designated Contracting States: CH DE FR LI (30) Priority: 21.03.1997 US 823318 (71) Applicant: Applied Films Corporation Longmont, CO 80504-9458 (US)	(72) Inventors: CHAPIN, John, S. Boulder, CO 80302 (US) ELLIOTT, Stephen, M. Boulder, CO 80303 (US) O'KEEFE, Patrick, L. Boulder, CO 80303 (US) (74) Representative: UEXKÜLL & STOLBERG  PatentanwälteBeselerstrasse 4 22607 Hamburg 22607 Hamburg (DE)