A METHOD OF PRODUCING THIN SILICON FILMS - Patent 0970514

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EP 0 970 514 A1

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(43)	Date of publication:
	12.01.2000 Bulletin 2000/02

(21)	Application number: 98900480.9

(22)	Date of filing: 21.01.1998

(51)	International Patent Classification (IPC)⁷: H01L 21/306, H01L 31/18

(86)	International application number:
	PCT/AU9800/027

(87)	International publication number:
	WO 9832/164 (23.07.1998 Gazette 1998/29)

(84)	Designated Contracting States:
	AT BE CH DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

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Priority:

21.01.1997 AU PO468697

(71)	Applicant: Boral Energy Ltd.
	Milton,Quensland 4064 (AU)

(72)	Inventors:
	WEBER, Klaus, Johannes Aranda, ACT 2614 (AU) BLAKERS, Andrew, William Aranda, ACT 2614 (AU)

(74)	Representative: Marshall, Monica Anne
	J.A. KEMP & CO.14 South SquareGray's Inn London WC1R 5LX London WC1R 5LX (GB)

(54)	A METHOD OF PRODUCING THIN SILICON FILMS