(19)
(11) EP 0 976 153 A1

(12)

(43) Date of publication:
02.02.2000 Bulletin 2000/05

(21) Application number: 98914425.8

(22) Date of filing: 02.04.1998
(51) International Patent Classification (IPC)7: H01L 21/768, H01L 23/522, H01L 23/532
(86) International application number:
PCT/US9806/492
(87) International publication number:
WO 9847/177 (22.10.1998 Gazette 1998/42)
(84) Designated Contracting States:
DE FR GB IE NL

(30) Priority: 17.04.1997 US 43261 P
25.03.1998 US 46474

(71) Applicant: AlliedSignal Inc.
Morristown,New Jersey 07962-2245 (US)

(72) Inventors:
  • WALLACE, Stephen
    Alburquerque, NM 87109 (US)
  • SMITH, Douglas, M.
    Alberquerque, NM 87106 (US)
  • RAMOS, Teresa
    Albuquerque, NM 87109 (US)
  • RODERICK, Kevin, H.
    Albuquerque, NM 87109 (US)
  • DRAGE, James, S.
    Fremont, CA 94555 (US)

(74) Representative: Freeman, Jacqueline Carol et al
W.P. THOMPSON & CO.Celcon House289-293 High Holborn
London WC1V 7HU
London WC1V 7HU (GB)

   


(54) NANOPOROUS DIELECTRIC FILMS WITH GRADED DENSITY AND PROCESS FOR MAKING SUCH FILMS