APPARATUS AND METHOD FOR A MODULAR ELECTRON BEAM SYSTEM FOR THE TREATMENT OF SURFACES - Patent 0978137

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EP 0 978 137 A1

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(43)	Date of publication:
	09.02.2000 Bulletin 2000/06

(21)	Application number: 98914685.7

(22)	Date of filing: 10.04.1998

(51)	International Patent Classification (IPC)⁷: H01J 37/06

(86)	International application number:
	PCT/US9807/253

(87)	International publication number:
	WO 9848/442 (29.10.1998 Gazette 1998/43)

(84)	Designated Contracting States:
	CH DE DK FR GB IT LI NL SE

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Priority:

24.04.1997 US 845513

(71)	Applicant: AMERICAN INTERNATIONAL TECHNOLOGIES, INC
	Torrance, CA 90501 (US)

(72)	Inventor:
	WAKALOPULOS, George Pacific Palisades, CA 90272 (US)

(74)	Representative: Kahler, Kurt, Dipl.-Ing.
	PatentanwälteKahler, Käck, Fiener et col.,Vorderer Anger 268 86899 Landsberg/Lech 86899 Landsberg/Lech (DE)

(54)	APPARATUS AND METHOD FOR A MODULAR ELECTRON BEAM SYSTEM FOR THE TREATMENT OF SURFACES