(84) |
Designated Contracting States: |
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DE ES FR GB IT |
(30) |
Priority: |
22.04.1997 JP 11743497
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(71) |
Applicants: |
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- EBARA CORPORATION
Ohta-kuTokyo 144 (JP)
DE ES FR GB IT
- Ube Industries, Ltd.
Ube-shi,Yamaguchi-ken 755-0052 (JP)
DE ES FR GB
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(72) |
Inventors: |
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- FUJIMURA, Hiroyuki
Tokyo 143 (JP)
- HIRAYAMA, Yoshio
Zushi-shi,Kanagawa 249 (JP)
- FUJINAMI, Shosaku
Tokyo 113 (JP)
- TAKANO, Kazuo
Tokyo 146 (JP)
- IRIE, Masaaki
Tokyo 135 (JP)
- HIROSE, Tetsuhisa
Tokyo 125 (JP)
- NAGATO, Shuichi
Yokohama-shi,Kanagawa 233 (JP)
- OSHITA, Takahiro
Yokohama-shi,Kanagawa 226 (JP)
- FUKUDA, Toshio
Yokohama-shi,Kanagawa 244 (JP)
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(74) |
Representative: Wagner, Karl H., Dipl.-Ing. et al |
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WAGNER & GEYERPatentanwälteGewürzmühlstrasse 5 80538 München 80538 München (DE) |
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