(19)
(11) EP 0 979 947 A3

(12) EUROPEAN PATENT APPLICATION

(88) Date of publication A3:
28.03.2001 Bulletin 2001/13

(43) Date of publication A2:
16.02.2000 Bulletin 2000/07

(21) Application number: 99306359.3

(22) Date of filing: 11.08.1999
(51) International Patent Classification (IPC)7: F04D 19/04, F04D 29/58
(84) Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE
Designated Extension States:
AL LT LV MK RO SI

(30) Priority: 12.08.1998 JP 22792298

(71) Applicant: SEIKO SEIKI KABUSHIKI KAISHA
Narashino-shi Chiba (JP)

(72) Inventors:
  • Yamauchi, Akira
    Narashino-shi, Chiba (JP)
  • Nonaka, Manabu
    Narashino-shi, Chiba (JP)
  • Okada, Takashi
    Narashino-shi, Chiba (JP)

(74) Representative: Sturt, Clifford Mark et al
Miller Sturt Kenyon 9 John Street
London WC1N 2ES
London WC1N 2ES (GB)

   


(54) Turbomolecular pump


(57) A turbomolecular pump is provided in which the structure of a stator blade (20) is improved for cooling rotor blades (2), thereby achieving a higher thermal conduction efficiency. The arrangement provides contact surfaces of the stator blades (20) and stator blade spacers (22) to be engaged/crushed upon assembling the pump.









Search report