(19)
(11) EP 0 980 581 A1

(12)

(43) Date of publication:
23.02.2000 Bulletin 2000/08

(21) Application number: 99911196.6

(22) Date of filing: 05.03.1999
(51) International Patent Classification (IPC)7: H01J 1/63, G03F 9/00
(86) International application number:
PCT/US9905/008
(87) International publication number:
WO 9945/558 (10.09.1999 Gazette 1999/36)
(84) Designated Contracting States:
DE FR GB IE IT

(30) Priority: 05.03.1998 US 76908 P

(71) Applicant: FED CORPORATION
Hopewell Junction, NY 12533 (US)

(72) Inventors:
  • JONES, Gary, W.
    Lagrangeville, NY 12540 (US)
  • CAMPOS, Richard, A.
    Cortlandt Manor, NY 10566 (US)
  • DESTAFENO, Joseph, J.
    Chester, NY 10918 (US)

(74) Representative: Grünecker, Kinkeldey, Stockmair & SchwanhäusserAnwaltssozietät 
Maximilianstrasse 58
80538 München
80538 München (DE)

   


(54) BLUE AND ULTRAVIOLET PHOTOLITHOGRAPHY WITH ORGANIC LIGHT EMITTING DEVICES