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EP 0 980 589 A1

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(43) Date of publication: 23.02.2000 Bulletin 2000/08 (21) Application number: 98904481.3 (22) Date of filing: 12.02.1998

(51) International Patent Classification (IPC)7: H01L 29/861, H01L 29/24, H01L 21/266, H01L 21/329 (86) International application number: PCT/SE9800/239 (87) International publication number: WO 9852/232 (19.11.1998 Gazette 1998/46)

(84) Designated Contracting States: CH DE FR GB IT LI SE (30) Priority: 09.05.1997 SE 9701724 (71) Applicant: ABB RESEARCH LTD. 8050 Zürich (CH)	(72) Inventors: ROTTNER, Kurt S-164 43 Kista (SE) SCHÖNER, Adolf S-164 43 Kista (SE) BAKOWSKI, Mietek S-151 60 Södertälje (SE) (74) Representative: Olsson, Jan et al Bjerkéns Patentbyra KBP.O.Box 1274 801 37 Gävle 801 37 Gävle (SE)