(19)
(11) EP 0 981 718 A1

(12)

(43) Date of publication:
01.03.2000 Bulletin 2000/09

(21) Application number: 98918443.7

(22) Date of filing: 17.04.1998
(51) International Patent Classification (IPC)7: G01B 11/24, G11B 7/09, G01J 3/40
(86) International application number:
PCT/US9807/884
(87) International publication number:
WO 9849/522 (05.11.1998 Gazette 1998/44)
(84) Designated Contracting States:
DE FR GB IT NL

(30) Priority: 25.04.1997 IL 12072697

(71) Applicants:
  • Galore Scantec Ltd.
    70400 Ness Ziona (IL)
  • Schaham, Moshe
    75437 Rishon Lezion (IL)

(72) Inventor:
  • SCHAHAM, Moshe
    75437 Rishon Lezion (IL)

(74) Representative: Bohnenberger, Johannes, Dr. et al
Meissner, Bolte & PartnerPostfach 86 06 24
81633 München
81633 München (DE)

   


(54) METHOD AND APPARATUS FOR IMAGING AN OBJECT BY DIFFRACTIVE AUTOFOCUS