(19)
(11) EP 0 983 208 A1

(12)

(43) Date of publication:
08.03.2000 Bulletin 2000/10

(21) Application number: 98925901.5

(22) Date of filing: 01.07.1998
(51) International Patent Classification (IPC)7: C01B 21/082, C01B 21/097, G02B 6/00, H01L 29/78
(86) International application number:
PCT/IB9801/017
(87) International publication number:
WO 9944/937 (10.09.1999 Gazette 1999/36)
(84) Designated Contracting States:
DE FR GB

(30) Priority: 05.03.1998 EP 98103888

(71) Applicant: International Business MachinesCorporation
Armonk, N.Y. 10504 (US)

(72) Inventors:
  • BLÖCHL, Peter
    CH-8134 Adliswil (CH)
  • GERMANN, Roland
    CH-8855 Wangen (CH)
  • OFFREIN, Bert, Jan
    CH-8135 Langnau (CH)
  • MASSAREK, Ilana
    CH-8800 Thalwil (CH)
  • SALEMINK, Huub, L.
    CH-8820 Waedenswil (CH)

(74) Representative: Klett, Peter Michael 
International Business Machines Corporation,Säumerstrasse 4
8803 Rüschlikon
8803 Rüschlikon (CH)

   


(54) MATERIAL WITH REDUCED OPTICAL ABSORPTION