(19)
(11) EP 0 988 575 A1

(12)

(43) Date of publication:
29.03.2000 Bulletin 2000/13

(21) Application number: 98930258.3

(22) Date of filing: 19.06.1998
(51) International Patent Classification (IPC)7: G02F 1/11
(86) International application number:
PCT/US9812/463
(87) International publication number:
WO 9903/016 (21.01.1999 Gazette 1999/03)
(84) Designated Contracting States:
DE GB NL SE

(30) Priority: 08.07.1997 US 51973 P
05.06.1998 US 92321

(71) Applicant: Etec Systems, Inc.
Hayward, CA 94545 (US)

(72) Inventors:
  • YAO, Shi-Kay
    El Monte, CA 91731 (US)
  • TAMKIN, John, M.
    Oro Valley, AZ 85737 (US)

(74) Representative: Grünecker, Kinkeldey, Stockmair & SchwanhäusserAnwaltssozietät 
Maximilianstrasse 58
80538 München
80538 München (DE)

   


(54) ACOUSTO-OPTIC MODULATOR ARRAY WITH REDUCED RF CROSSTALK