(19)

(11)

EP 0 993 606 A1

(12)

(43) Date of publication: 19.04.2000 Bulletin 2000/16 (21) Application number: 99921622.9 (22) Date of filing: 03.05.1999

(51) International Patent Classification (IPC)7: G01N 27/26 (86) International application number: PCT/US9909/659 (87) International publication number: WO 9957/549 (11.11.1999 Gazette 1999/45)

(84) Designated Contracting States: AT CH DE FR GB LI NL (30) Priority: 01.05.1998 US 83882 P (71) Applicant: SEMITOOL, INC. Kalispell,Montana 59901 (US)	(72) Inventors: TAYLOR, Thomas, C. Kalispell, MT 59901 (US) RITZDORF, Thomas L. Kalispell, MT 59901 (US) LINDBERG, Fredrick A. Kalispell, MT 59901 (US) CARPENTER, Bradley C. Kalispell, MT 59901 (US) (74) Representative: Hitchcock, Esmond Antony  Lloyd Wise, Tregear & Co.,Commonwealth House,1-19 New Oxford Street London WC1A 1LW London WC1A 1LW (GB)