(19)
(11) EP 0 995 218 A1

(12)

(43) Date of publication:
26.04.2000 Bulletin 2000/17

(21) Application number: 98930963.8

(22) Date of filing: 13.07.1998
(51) International Patent Classification (IPC)7: H01J 37/32, B29C 59/14, C23C 16/50, B05D 3/14
(86) International application number:
PCT/IB9801/058
(87) International publication number:
WO 9904/411 (28.01.1999 Gazette 1999/04)
(84) Designated Contracting States:
DE ES FR GB IT

(30) Priority: 14.07.1997 US 2417 P
09.10.1997 US 947716
09.10.1997 US 947714

(71) Applicant: THE UNIVERSITY OF TENNESSEE RESEARCH CORPORATION
Knoxville, TN 37996-1526 (US)

(72) Inventors:
  • SPENCE, Paul
    Greer, SC 29650 (US)
  • LYNCH, John
    Laurel, MD 20723 (US)

(74) Representative: Shindler, Nigel 
BATCHELLOR, KIRK & CO.102-108 Clerkenwell Road
London EC1M 5SA
London EC1M 5SA (GB)

   


(54) PLASMA TREATER SYSTEMS AND TREATMENT METHODS