(19)
(11) EP 0 995 227 A1

(12)

(43) Date of publication:
26.04.2000 Bulletin 2000/17

(21) Application number: 98924756.4

(22) Date of filing: 11.05.1998
(51) International Patent Classification (IPC)7: H01L 21/425
(86) International application number:
PCT/US9809/567
(87) International publication number:
WO 9852/216 (19.11.1998 Gazette 1998/46)
(84) Designated Contracting States:
DE FR GB IE IT NL

(30) Priority: 12.05.1997 US 46276 P
19.02.1998 US 26115
19.02.1998 US 26027

(71) Applicant: Silicon Genesis Corporation
Campbell, CA 95008 (US)

(72) Inventors:
  • HENLEY, Francois, J.
    Los Gatos, CA 95030 (US)
  • CHEUNG, Nathan, W.
    Albany, CA 94706 (US)

(74) Representative: Kazi, Ilya et al
Mathys & Squire,100 Gray's Inn Road
London WC1X 8AL
London WC1X 8AL (GB)

   


(54) A CONTROLLED CLEAVAGE PROCESS