(19)
(11) EP 0 995 228 A1

(12)

(43) Date of publication:
26.04.2000 Bulletin 2000/17

(21) Application number: 98915322.6

(22) Date of filing: 07.04.1998
(51) International Patent Classification (IPC)7: H01L 21/768
(86) International application number:
PCT/US9806/828
(87) International publication number:
WO 9900/839 (07.01.1999 Gazette 1999/01)
(84) Designated Contracting States:
DE FR GB NL

(30) Priority: 26.06.1997 US 883197

(71) Applicant: ADVANCED MICRO DEVICES INC.
Sunnyvale,California 94088-3453 (US)

(72) Inventors:
  • BANDYOPADHYAY, Basab
    Austin, TX 78731 (US)
  • GATTO, Michael, J.
    Austin, TX 78735 (US)

(74) Representative: Sanders, Peter Colin Christopher 
BROOKES & MARTINHigh Holborn House52/54 High Holborn
London WC1V 6SE
London WC1V 6SE (GB)

   


(54) DUAL DAMASCENE ETCH PROCESS