(19)
(11) EP 0 996 963 A1

(12)

(43) Date of publication:
03.05.2000 Bulletin 2000/18

(21) Application number: 98931251.7

(22) Date of filing: 18.06.1998
(51) International Patent Classification (IPC)7H01L 21/00
(86) International application number:
PCT/US9812/239
(87) International publication number:
WO 9902/996 (21.01.1999 Gazette 1999/03)
(84) Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

(30) Priority: 11.07.1997 US 890816

(71) Applicant: Genmark Automation, Inc.
Sunnyvale, CA 94089 (US)

(72) Inventors:
  • GENOV, Genco
    San Jose, CA 95120 (US)
  • TODOROV, Alexander
    Sunnyvale, CA 94086 (US)
  • IVANOV, Entcho
    Sunnyvale, CA 94087 (US)
  • BOTEV, Roumen
    Sunnyvale, CA 94086 (US)
  • MICHAYLOV, Vladimir
    Sunnyvale, CA 94086 (US)
  • KOSTOV, Lubo
    Sunnyvale, CA 94086 (US)
  • SOTIROV, Zlatko
    Sunnyvale, CA 94087 (US)
  • BONEV, Eugene
    Santa Clara, CA 95050 (US)

(74) Representative: Brykman, Georges et al
c/o Société de Protection des Inventions,3, rue du Docteur Lancereaux
75008 Paris
75008 Paris (FR)

   


(54) MULTIPLE POINT POSITION SCANNING SYSTEM