(19)

(11)

EP 0 998 758 A1

(12)

(43) Date of publication: 10.05.2000 Bulletin 2000/19 (21) Application number: 98931554.4 (22) Date of filing: 23.06.1998

(51) International Patent Classification (IPC)7: H01L 31/18, H01L 21/3213 (86) International application number: PCT/US9813/139 (87) International publication number: WO 9859/379 (30.12.1998 Gazette 1998/52)

(84) Designated Contracting States: BE DE GB NL (30) Priority: 25.06.1997 US 881323 (71) Applicant: Applied Komatsu Technology, Inc. Santa Clara, CA 95054 (US)	(72) Inventors: CHEN, Jie Cupertino, CA 95014 (US) GOTO, Haruhiro Saratoga, CA 95070 (US) KOLLRACK, Marc, Michael Sunnyvale, CA 94086 (US) WANG, Kai-An Berkeley, CA 94710 (US) WU, Tzy-Chung Fremont, CA 94529 (US) WONG, Yuen-Kui Fremont, CA 94539 (US) (74) Representative: Bayliss, Geoffrey Cyril et al BOULT, WADE & TENNANT27 Furnival Street London EC4A 1PQ London EC4A 1PQ (GB)