[0001] The present invention relates to extractive distillation processes for purifying
difluoromethane (CF
2H
2, HFC-32).
BACKGROUND OF THE INVENTION
[0002] New regulations have been established to protect the stratospheric ozone layer from
possible damage by chlorofluorocarbons (CFCs). Highly purified HFC-32 is a hydrofluorocarbon
(HFC) that is valuable as an etchant gas in plasma etching of materials used in the
fabrication of semiconductor devices.
[0003] HFC-32 may be prepared by allowing methylene chloride (CCl
2H
2) to react with hydrogen fluoride (HF) in the presence of an oxidized metal catalyst
of metals such as chromium, antimony, and tantalum. HFC-32 may also be co-produced
with HFCs such as pentafluoroethane (CF
3CF
2H, HFC-125) by such metal mediated processes in which an HFC-125 precursor compound
such as tetrachloroethylene (CCl
2=CCl
2) is utilized. The HFC-32 reaction product obtained from such processes may contain
one or more of HFC-125, unreacted methylene chloride and HF, byproduct hydrogen chloride
(HCl), and small amounts of organic byproducts such as 1,1,1-trifluoroethane (CF
3CH
3, HFC-143a), dichlorodifluoromethane (CCl
2F
2, CFC-12), chloropentafluoroethane (CClF
2CF
3, CFC-115), methyl chloride (CH
3Cl, HCC-40), methyl fluoride (CH
3F, HFC-41), trifluoromethane (CF
3H, HFC-23), chlorodifluoromethane (CHClF
2, HCFC-22), and 1,1-difluoroethane (CF
2HCH
3, HFC-152a). The presence of even trace amounts of such impurities in HFC-32 can be
undesirable in the utilization of HFC-32 as an etchant gas in plasma processes employed
in the semiconductor industry.
[0004] Casey et al., in PCT publication WO9703936 disclose processes for separation of HFC-32
and HFC-125 by azeotropic distillation of a low boiling HFC-32/HFC-125 azeotrope,
separation of a mixture of HFC-32 and CFC-115 by azeotropic distillation of a low
boiling HFC-32/CFC-115 azeotrope, separation of a mixture of HFC-32 and HFC-125 by
extractive distillation employing methylene chloride as extractive agent, and separation
of a mixture of HFC-32 and HFC-143a by employing CFC-115 as extractive agent.
[0005] Takahashi Reiji et al., in Japanese patent application JP 07291878, describe a process
for the removal of HFC-143a, HFC-125, and methyl chloride from HFC-32 by extractive
distillation. This process is characterized by employing at least one of 1,1-dichloro-1-fluoroethane
(CCl
2FCH
3, HCFC-141b), dichloropentafluoropropane, trichlorotrifluoroethane, and 2,2-dichloro-1,1,1-trifluoroethane
(CHCl
2CF
3, HCFC-123) as extractive agent. Using such CFC extractive agents is relatively expensive,
and regulations concerning protection of the stratospheric ozone layer will cause
CFCs to be phased out as commercial products thereby making CFCs unavailable or for
such a process.
[0006] The present invention solves problems associated with conventional purification methods
and provides lower cost and more economical processes for separating HFC-32 from mixtures
comprising HFC-32 and at least one halocarbon selected from HFC-143a, CFC-12, HFC-125,
and CFC-115.
SUMMARY OF THE INVENTION
[0007] The present invention comprises a process for separating difluoromethane (HFC-32)
from at least one halocarbon of a first mixture comprising difluoromethane (HFC-32)
and halocarbon selected from the group consisting of dichlorodifluoromethane (CFC-12),
1,1,1-trifluoroethane (HFC-143a), chloropentafluoroethane (CFC-115), and pentafluoroethane
(HFC-125), comprising the steps of:
contacting the first mixture with an extractive agent selected from the group consisting
of:
hydrocarbon extractive agents comprising hydrocarbons having from 5 to 9 carbon atoms
and having a normal boiling point greater than about 30°C and less than about 155°C,
oxygen-containing extractive agents comprising alcohols having a normal boiling point
greater than about 60°C and less than about 100°C and represented by the formula CxH2x+1OH, wherein x is from 1 to 3, and ketones having a normal boiling point greater than
about 50°C and less than about 110°C and represented by the formula CyH2y+1COCzH2z+1, wherein y and z are 1 or greater and y+z is at most 5, and
chlorocarbon extractive agents comprising chlorocarbons having a normal boiling point
greater than about 39°C and less than about 150°C and represented by the formula CsH2s+2tClt, wherein s is 1 or 2 and t is from 2 to 4 to form a second mixture,
separating difluoromethane (HFC-32) from at least one halocarbon of the second mixture
by extractively distilling the second mixture, and
recovering difluoromethane (HFC-32) substantially free of at least one halocarbon,
with the proviso that when the halocarbon is pentafluoroethane (HFC-125), the chlorocarbon
extractive agent may not be methylene chloride.
BRIEF DESCRIPTION OF THE DRAWINGS
[0008] Figure 1.- FIG.1 is a schematic diagram of an extractive distillation system that
can be used for practicing an aspect of the present process.
DETAILED DESCRIPTION
[0009] HFC-32 is commonly synthesized by fluorination of methylene chloride by a process
wherein methylene chloride is allowed to react with hydrogen fluoride in the presence
of a metal catalyst. HFC-32 so produced can contain a variety of impurities such as
HCl, halocarbons such as HFC-143a and CFC-12, as well as unreacted methylene chloride
and HF, among others. HFC-32 may also be co-produced with HFCs such as HFC-125 by
such metal mediated processes in which an HFC-125 precursor compound such as tetrachloroethylene
(CCl
2=CCl
2) is utilized. In the event of such HFC-32/HFC-125 co-production, HFC-32 product may
additionally contain HFC-125 and HFC-125 byproducts such as CFC-115. While most of
the process impurities can be removed by conventional distillation, the halocarbons
CFC-12, HFC-143a, CFC-115, and HFC-125 are difficult if not impossible to remove by
conventional distillation methods. This difficulty is due to the fact that CFC-12,
HFC-143a, CFC-115, and HFC-125 form known azeotropes with HFC-32.
[0010] Halocarbon impurities of the present invention refers to at least one halocarbon
selected from the group consisting of CFC-12, HFC-143a, CFC-115, and HFC-125. In their
separate and pure states, HFC-32 and the halocarbon impurities have atmospheric boiling
points of about -52°C (HFC-32), -48°C (HFC-125), -47°C (HFC-143a), -39°C (CFC-115),
and -30° (CFC-12). However, a mixture comprising at least one such halocarbon and
HFC-32 exhibits non-ideal vapor-liquid behavior such that the relative volatility
of HFC-32 and halocarbon is very near 1.0. Conventional distillation procedures are
incapable of efficiently separating HFC-32 from these halocarbons in instances. where
the relative volatility of HFC-32 and halocarbon is very near 1.0. The term conventional
distillation refers to the practice where only the relative volatility of the components
of a mixture to be separated is used to separate the components.
[0011] To determine the relative volatility of HFC-32 and halocarbon, a method known as
the PTx method was used. Use of the PTx method is described in detail in "Phase Equilibrium
in Process Design," Wiley-Interscience Publisher, 1970; written by Harold R. Null,
pages 124 through 126, hereby incorporated by reference. In the PTx method, the total
absolute pressure in a cell of known volume is measured at a constant temperature
for various known binary compositions of HFC-32 and halocarbon. These total pressure
measurements are converted into equilibrium vapor and liquid compositions by employing
an activity coefficient equation model such as the Non-Random, Two Liquid (NRTL) equation,
which represents liquid phase non-idealities. Use of an activity coefficient equation
such as the NRTL equation, is described in "The Properties of Gases and Liquids,"
4
th edition, published by McGraw Hill, written by Reid, Prausnitz and Poling, pages 241
through 387; and in "Phase Equilibria in Chemical Engineering," published in 1985
by Butterworth Publishers, written by Stanley M. Walas, pages 165 through 244. Both
aforementioned references are hereby incorporated by reference. Without wishing to
be bound by theory, it is believed that the NRTL equation can sufficiently predict
the relative volatilities of mixtures comprising HFC-32 and the halocarbon impurities
of the present invention.
[0012] The results of PTx measurements and the above calculations indicate that the relative
volatilities of HFC-32 and halocarbon are equal to 1 for given compositions of HFC-32
and halocarbon over a range of temperatures. Relative volatilities of 1 in a mixture
indicate the formation of an azeotrope. The results of PTx measurements and the above
calculations indicate that the composition of the azeotropes varies with temperature.
Tables 1 through 4 show the results of these calculations, specifically, how the composition
of the HFC-32/halocarbon azeotropes varies with temperature. Because of the formation
of azeotropes, it is difficult, if not impossible, to completely separate HFC-32 from
halocarbon by conventional distillation techniques at temperatures and pressures within
the ranges shown in Tables 1 through 4.
[0013] By azeotrope or azeotropic composition is meant a substantially constant boiling
liquid mixture of two or more substances that behaves as a single substance. One way
to characterize an azeotropic composition or mixture is that the vapor produced by
partial evaporation or distillation of the liquid has substantially the same composition
as the liquid from which it was evaporated or
Table 1 -
| Variation of the HFC-32/CFC-12 Azeotropic Composition with Temperature |
| Pressure/composition measurements were taken at 0°C and 40 °C and extrapolated over
the temperature range using the aforementioned calculations. |
| Temp. (°C) |
CFC-12 Mole Fraction, Liquid Phase |
CFC-12 Mole Fraction, Vapor Phase |
HFC-32 Mole Fraction, Liquid Phase |
HFC-32 Mole Fraction, Vapor Phase |
Vapor Pressure kPa (psia) |
Relative Volatility HFC-32/ CFC-12 |
| -80.0 |
0.1771 |
0.1771 |
0.8229 |
0.8229 |
20.7 (3.0) |
1.000 |
| -60.0 |
0.1802 |
0.1802 |
0.8198 |
0.8198 |
71.0(10.3) |
1.000 |
| -40.0 |
0.1757 |
0.1757 |
0.8243 |
0.8243 |
190.3 (27.6) |
1.000 |
| -20.0 |
0.1647 |
0.1647 |
0.8353 |
0.8353 |
428.2 (62.1) |
1.000 |
| 0.0 |
0.1480 |
0.1480 |
0.8520 |
0.8520 |
844.6 (122.5) |
1.000 |
| 10.0 |
0.1376 |
0.1376 |
0.8624 |
0.8624 |
1141.8 (165.6) |
1.000 |
| 20.0 |
0.1255 |
0.1255 |
0.8745 |
0.8745 |
1510.6 (219.1) |
1.000 |
| 40.0 |
0.0946 |
0.0946 |
0.9054 |
0.9054 |
2509.0 (363.9) |
1.000 |
| 50.0 |
0.0736 |
0.0736 |
0.9265 |
0.9265 |
3164.0 (458.9) |
1.000 |
| 55.0 |
0.0602 |
0.0602 |
0.9398 |
0.9398 |
3537.0 (513.0) |
1.000 |
Table 2 -
| Variation of the HFC-32/HFC-143a Azeotropic Composition with Temperature |
| Pressure/composition measurements were taken at -17°C and 40°C and extrapolated over
the temperature range using the aforementioned calculations. |
| Temp. (°C) |
HFC-143a Mole Fraction, Liquid Phase |
HFC-143a Mole Fraction, Vapor Phase |
HFC-32 Mole Fraction, Liquid Phase |
HFC-32 Mole Fraction, Vapor Phase |
Vapor Pressure kPa (psia) |
Relative Volatility HFC-32/ HFC-143a |
| -80.0 |
0.2830 |
0.2830 |
0.7170 |
0.7170 |
20.0 (2.9) |
1.000 |
| -60.6 |
0.2334 |
0.2334 |
0.7666 |
0.7666 |
66.9 (9.7) |
1.000 |
| -50.0 |
0.2078 |
0.2078 |
0.7922 |
0.7922 |
113.1 (16.4) |
1.000 |
| -40.0 |
0.1818 |
0.1818 |
0.8182 |
0.8182 |
180.6 (26.2) |
1.000 |
| -20.0 |
0.1286 |
0.1286 |
0.8714 |
0.8714 |
408.9 (59.3) |
1.000 |
| 0.0 |
0.0736 |
0.0736 |
0.9265 |
0.9265 |
815.0 (118.2) |
1.000 |
| 10.0 |
0.0448 |
0.0448 |
0.9553 |
0.9553 |
1108.0 (160.7) |
1.000 |
| 20.0 |
0.0144 |
0.0144 |
0.9856 |
0.9856 |
1474.8 (213.9) |
1.000 |
| 23.0 |
0.0048 |
0.0048 |
0.9952 |
0.9952 |
1601.0 (232.2) |
1.000 |
Table 3 -
| Variation of the HFC-32/CFC-115 Azeotropic Composition with Temperature |
| Pressure/composition measurements were taken at 0°C and 39°C and extrapolated over
the temperature range using the aforementioned calculations. |
| Temp. (°C) |
CFC-115 Mole Fraction, Liquid Phase |
CFC-115 Mole Fraction, Vapor Phase |
HFC-32 Mole Fraction, Liquid Phase |
HFC-32 Mole Fraction, Vapor Phase |
Vapor Pressure kPa (psia) |
Relative Volatility HFC-32/ CFC-115 |
| -80.0 |
0.3040 |
0.3040 |
0.6960 |
0.6960 |
23.4 (3.4) |
1.000 |
| -60.0 |
0.3075 |
0.3075 |
0.6925 |
0.6925 |
80.7 (11.1) |
1.000 |
| -40.0 |
0.3023 |
0.3023 |
0.6977 |
0.6977 |
217.2 (31.5) |
1.000 |
| -20.0 |
0.2922 |
0.2922 |
0.7078 |
0.7078 |
486.8 (70.6) |
1.000 |
| 0.0 |
0.2786 |
0.2786 |
0.7215 |
0.7215 |
953.5 (138.3) |
1.000 |
| 10.0 |
0.2703 |
0.2703 |
0.7297 |
0.7297 |
1281.7 (185.9) |
1.000 |
| 20.0 |
0.2607 |
0.2607 |
0.7393 |
0.7393 |
1684.4(244.3) |
1.000 |
| 40.0 |
0.2345 |
0.2345 |
0.7655 |
0.7655 |
2746.9 (398.4) |
1.000 |
| 60.0 |
0.1848 |
0.1848 |
0.8152 |
0.8152 |
4180.3 (606.3) |
1.000 |
| 80.0 |
0.0071 |
0.0071 |
0.9929 |
0.9929 |
5971.6 (866.1) |
1.000 |
Table 4 -
| Variation of the HFC-32/HFC-125 Azeotropic Composition with Temperature |
| Pressure/composition measurements were taken at -38, -15, 15, and 44°C 10 and extrapolated
over the temperature range using the aforementioned calculations. |
| Temp. (°C) |
HFC-125 Mole Fraction, Liquid Phase |
HFC-125 Mole Fraction, Vapor Phase |
HFC-32 Mole Fraction, Liquid Phase |
HFC-32 Mole Fraction, Vapor Phase |
Vapor Pressure kPa (psia) |
Relative Volatility HFC-32/ HFC-125 |
| -80.0 |
0.1514 |
0.1514 |
0.8486 |
0.8486 |
193 (2.8) |
1.000 |
| - 60.0 |
0.1359 |
0.1359 |
0.8641 |
0.8641 |
65.5 (9.5) |
1.000 |
| - 40.0 |
0.1165 |
0.1165 |
0.8835 |
0.8835 |
178.6 (25.9) |
1.000 |
| - 20.0 |
0.0952 |
0.0952 |
0.9048 |
0.9048 |
407.5 (59.1) |
1.000 |
| 0.0 |
0.0746 |
0.0746 |
0.9254 |
0.9254 |
815.0 (118.2) |
1.000 |
| 20.0 |
0.0592 |
0.0592 |
0.9408 |
0.9408 |
1476.9 (214.2) |
1.000 |
| 40.0 |
0.590 |
0.590 |
0.9410 |
0.9410 |
2482.1 (360.0) |
1.000 |
| 50.0 |
0.0737 |
0.0737 |
0.9263 |
0.9263 |
3148.8 (456.7) |
1.000 |
distilled, i.e., the mixture distills/refluxes without compositional change. Constant
boiling compositions are characterized as azeotropic because they exhibit either a
maximum or minimum boiling point relative to that of the pure components. Azeotropic
compositions are also characterized by a minimum or a maximum in the vapor pressure
measurements relative to the vapor pressure of the pure components in a PTx cell as
a function of composition at a constant temperature.
[0014] The fact that the HFC-32/halocarbon low-boiling (high pressure) azeotropic compositions
vary depending on temperature and pressure provides a method of separating and partially
purifying the HFC-32 from halocarbon. This method is known as azeotropic distillation
and allows for partial separation of the azeotrope into its components within a distillation
column. If the HFC-32/halocarbon azeotropic composition formed under one temperature/pressure
is then distilled under a different temperature/pressure, the composition of the azeotrope
will change such that one component, HFC-32 or halocarbon, is now in excess relative
to the newly-formed azeotropic composition. By excess component is meant the component
of an azeotropic composition which is in excess of the quantity of that component
which is required for azeotropic formation at a given temperature and pressure. The
newly formed azeotropic composition may then be distilled overhead while the excess
component is recovered as column bottoms. For example, a distillation column can be
operated at a temperature and pressure that causes the azeotropic composition to form.
If the quantity of HFC-32 is relatively large in comparison to, for instance, HFC-143a,
i.e. the concentration of HFC-32 is greater than that in the azeotropic composition,
the HFC-32 can be removed in substantially pure form from the bottom of the column,
while the azeotropic composition is removed from the top of the column.
[0015] The results of PTx measurements and the aforementioned calculations for HFC-32 and
halocarbon in the presence of various extractive distillation agents are summarized
in Tables 5 through 8. Shown are activity coefficients at 0 °C for HFC-32/CFC-12 (Table
5), HFC-32/HFC-143a (Table 6), HFC-32/CFC-115 (Table 7) and HFC-32/HFC-125 (Table
8) at infinite dilution in the listed extraction agent. Also shown are the ratios
of HFC-32 activity coefficient to halocarbon activity coefficient (relative volatility).
The ratio of the activity coefficient for HFC-32 at infinite dilution in an extractive
agent relative to the activity coefficient of halocarbon at infinite dilution in the
proposed extractive agent is the relative volatility of HFC-32 and halocarbon in the
presence of the extractive agent.
Table 5 -
| Extractive Agents for HFC-32/CFC-12 |
| |
Infinite Dilution Activity Coefficients at 0°C |
| Extractive Agent |
Formula |
NBP* (°C) |
HFC-32 |
CFC-12 |
Ratio |
| n-Pentane |
C5H12 |
36.1 |
7.04 |
1.38 |
5.10 |
| Methylcyclopentane |
C6H12 |
71.8 |
9.30 |
1.86 |
5.00 |
| n-Hexane |
C6H14 |
68.7 |
7.25 |
1.48 |
4.90 |
| Methanol |
CH3OH |
64.6 |
3.89 |
10.82 |
0.36 |
| Acetone |
CH3COCH3 |
56.3 |
0.77 |
3.23 |
0.24 |
| Methylene Chloride |
CH2Cl2 |
39.8 |
2.77 |
4.04 |
0.69 |
| *NBP = Normal Boiling Point (temperature at which vapor pressure is equal to 1.013x105 Pa (1 atmosphere) |
Table 6-
| Extractive Agents for HFC-32/HFC-143a |
| |
Infinite Dilution Activity Coefficients at 0°C |
| Extractive Agent |
Formula |
NBP* (°C) |
HFC-32 |
HFC-143a |
Ratio |
| n-Pentane |
C5H12 |
36.1 |
7.04 |
4.79 |
1.47 |
| Cyclopentane |
C5H10 |
49.3 |
10.78 |
7.91 |
1.36 |
| Methylcyclopentane |
C6H12 |
71.8 |
9.30 |
6.82 |
1.36 |
| n-Hexane |
C6H14 |
68.7 |
7.25 |
5.22 |
1.39 |
| Methanol |
CH3OH |
64.6 |
3.89 |
7.71 |
0.50 |
| Acetone |
CH3COCH3 |
56.3 |
0.77 |
1.78 |
0.43 |
| Methylene Chloride |
CH2Cl2 |
39.8 |
2.77 |
4.82 |
0.57 |
Table 7 -
| Extractive Agents for HFC-32/CFC-115 |
| |
Infinite Dilution Activity Coefficients at 0°C |
| Extractive Agent |
Formula |
NBP (°C) |
HFC-32 |
CFC-115 |
Ratio |
| n-Pentane |
C5H12 |
36.1 |
7.04 |
6.61 |
1.07 |
| Cyclopentane |
C5H10 |
49.3 |
10.78 |
5.95 |
1.81 |
| n-Hexane |
C6H14 |
68.7 |
7.25 |
3.94 |
1.84 |
| Methanol |
CH3OH |
64.6 |
3.89 |
37.45 |
0.10 |
| Acetone |
CH3COCH3 |
56.3 |
0.77 |
12.03 |
0.064 |
| Methylene Chloride |
CH2Cl2 |
39.8 |
2.77 |
19.55 |
0.14 |
Table 8 -
| Extractive Agents for HFC-32/HFC-125 |
| |
Infinite Dilution Activity Coefficients at 0°C |
| Extractive Agent |
Formula |
NBP (°C) |
HFC-32 |
HFC-125 |
Ratio |
| n-Pentane |
C5H12 |
36.1 |
7.04 |
9.34 |
0.75 |
| Cyclopentane |
C5H10 |
49.3 |
10.78 |
11.04 |
0.98 |
| n-Hexane |
C6H14 |
68.7 |
7.25 |
6.65 |
1.09 |
| Methanol |
CH3OH |
64.6 |
3.89 |
3.94 |
0.99 |
| Acetone |
CH3COCH3 |
56.3 |
0.77 |
0.87 |
0.89 |
| Methylene Chloride |
CH2Cl2 |
39.8 |
2.77 |
9.53 |
0.29 |
[0016] The problems encountered upon conventional distillation of HFC-32/halocarbon, such
as the need for taller columns, higher energy input, and lower resultant HFC-32 recovery,
can be solved by practicing the present inventive extractive distillation process.
By extractive distillation is meant a process in which an extractive agent is introduced
at an upper feed point of a distillation column, whereas the mixture requiring separation
is introduced at the same point or preferably, at a relatively lower feed point of
the column. The substantially liquid extractive agent passes downwardly through trays
or packing in the column and exits the column bottoms with one or more components
of the mixture to be separated. While in the presence of the extractive agent, at
least one of the components of an initial mixture to be separated becomes relatively
more volatile compared to the other components of the mixture, with that more volatile
component of the initial mixture exiting the column overheads. Extractive distillation
may be employed when the components of a mixture have relative volatilities that do
not afford effective separation of the components by conventional distillation. In
extractive distillation, an extractive agent is used which causes the relative volatilities
of the components in a mixture to be altered such that the resultant relative volatilities,
i.e., that of components of the mixture in the presence of the extractive agent, become
sufficient to permit separation of the components by distillation techniques. The
difficulty in applying this method is that there is no way of predicting which, if
any, compound will be an effective extractive distillation agent for a given azeotropic
composition.
[0017] The present inventors have discovered through experimentation that the relative volatility
of compositions comprising HFC-32 and at least one of the halocarbons CFC-12, HFC-143a,
CFC-115, and HFC-125 can be altered from 1.0 in the presence of extractive agents
selected from: hydrocarbons having 5 to 9 carbon atoms and having a normal boiling
point greater than about 30°C and less than about 155°C; alcohols having a normal
boiling point greater than about 60°C and less than about 100°C and represented by
the formula C
xH
2x+1OH, wherein x is from 1 to 3; ketones having a normal boiling point greater than about
50°C and less than about 110°C and represented by the formula C
yH
2y+1COC
zH
2z+1, wherein y and z are 1 or greater and y+z is at most 5; and chlorocarbons having
a normal boiling point greater than about 39°C and less than about 150°C and represented
by the formula C
sH
2s+2-tCl
t, wherein s is 1 or 2 and t is from 2 to 4.
[0018] This discovery allows for separation of HFC-32 from a first mixture comprising HFC-32
and halocarbon by extractive distillation in the presence of an appropriate extractive
agent. The appropriate extractive agent for a first mixture comprising HFC-32 and
halocarbon is one which causes the relative volatility of the HFC-32 and halocarbon
to be greater than 1.0, with the HFC-32 being more volatile, thus permitting HFC-32
to be removed from the top of the distillation zone. Alternately, the appropriate
extractive agent for a first mixture comprising HFC-32 and halocarbon is one which
causes the relative volatility of the HFC-32 and halocarbon to be less than 1.0, with
the HFC-32 being less volatile, thus permitting halocarbon to be removed from the
top of the distillation zone and HFC-32 to be removed from the bottom of the distillation
zone together with the extractive agent In order for an extractive agent to be effective
in separating HFC-32 from halocarbon by extractive distillation, the relative volatility
of the HFC-32 and halocarbon in the presence of the extractive agent must theoretically
be greater than or less than about 1.0. For practical purposes it must generally be
greater than about 1.1 or less than about 0.9. Normally, for commercially useful separation
of 32 and halocarbon to occur in the present extractive distillation process, this
relative volatility will be greater than about 1.3 or less than about 0.5, and still
more preferably it will be greater than about 2.0 or less than about 0.3. When more
than one halocarbon is present in a first mixture comprising HFC-32 and halocarbon,
an effective extractive agent is one for which the relative volatility for each HFC-32/halocarbon
pair of the first mixture satisfies the aforementioned relative volatility criteria
in the same direction relative to 1.0. For instance, when CFC-12 and HFC-143a halocarbon
impurities are both present in HFC-32 concurrently, an effective extractive agent
is one for which the relative volatilities for both HFC-32/CFC-12 and HFC-32/HFC-143a
are greater than 1.0.
[0019] The present inventors have discovered that at least one halocarbon selected from
the group consisting of CFC-12, HFC-143a, CFC-115, and HFC-125 can be efficiently
separated from HFC-32 by using an extractive distillation process with a hydrocarbon
extractive agent comprising at least one linear, branched, or cyclic aliphatic hydrocarbon
having a normal boiling point greater than about 30°C and less than about 155°C selected
from the families of hydrocarbons known as pentanes, hexanes, heptanes, octanes, and
nonanes. Hydrocarbon extractive agents with a normal boiling point between about 60°C
and 110°C are especially useful. Preferred hydrocarbon extractive agents are n-pentane,
cyclopentane, methylcyclopentane, n-hexane, cyclohexane and n-heptane. Hydrocarbon
extractive agents used in the present invention are generally commercially available.
Commercial grade hydrocarbons, such as Optima® grade Hexane available from Fisher
Scientific, Pittsburgh, PA, USA, containing 2-methylpentane (0.2 volume %), 3-methylpentane
(3.5%), n-hexane (85.4%), methylcyclopentane (10.9%), may be employed as hydrocarbon
extractive agent in the process of the present invention. The extractive agent is
chosen such that under the conditions of the extractive distillation, the extractive
agent is not in the solid phase, i.e., the extractive agent does not freeze and form
solid in the apparatus.
[0020] The present inventors have discovered that at least one halocarbon selected from
the group consisting of CFC-12, HFC-143a, CFC-115, and HFC-125 can be efficiently
separated from HFC-32 by using an extractive distillation process with an oxygen-containing
extractive agent comprising: alcohols having a normal boiling point greater than about
60°C and less than about 100°C and represented by the formula C
xH
2x+1OH, wherein x is from 1 to 3; and ketones having a normal boiling point greater than
about 50°C and less than about 110°C and represented by the formula C
yH
2y+1COC
zH
2z+1, wherein y and z are 1 or greater and y+z is at most 5. Representative oxygen-containing
extractive agents are methanol, ethanol, n-propanol, iso-propanol, propanone (acetone),
and butanone.
[0021] The present inventors have discovered that at least one halocarbon selected from
the group consisting of CFC-12, HFC-143a, CFC-115, and HFC-125 can be efficiently
separated from HFC-32 by using an extractive distillation process with a chlorocarbon
extractive agent comprising chlorocarbons having a normal boiling point greater than
about 39°C and less than about 150°C and represented by the formula C
sH
2s+2-tCl
t, wherein s is 1 or 2 and t is from 2 to 4. Representative chlorocarbon extractive
agents are methylene chloride (CH
2Cl
2), chloroform (trichloromethane, CHCl
3), carbon tetrachloride (CCl
4), dichloroethane (CH
3CHCl
2, CH
2ClCH
2Cl), trichloroethane (CH
3CCl
3, CHCl
2CH
2Cl), and tetrachloroethane (CH
2ClCCl
3, CHCl
2CHCl
2).
[0022] The extractive distillation processes of the present invention for separating HFC-32
from at least one halocarbon comprise the steps of:
a) contacting a HFC-32/halocarbon first mixture with an extractive agent to form a
second mixture, and
b) separating the HFC-32 from at least one halocarbon of the second mixture by extractively
distilling the second mixture in an extractive distillation zone thereby recovering
HFC-32 substantially free of at least one halocarbon:
as an overhead product, and from the bottom of the zone a third mixture comprising
the extractive agent and halocarbon for the embodiment of the present invention wherein
the HFC-32 and halocarbon relative volatility is greater than 1.0, or
as a bottoms product together with extractive agent, and as a third mixture an overhead
product comprising halocarbon for the embodiment of the present invention wherein
the HFC-32 and halocarbon relative volatility is less than 1.0.
[0023] In each of the aforementioned embodiments, the extractive agent is preferably recycled.
For instance, for extractive agents causing a HFC-32 and halocarbon relative volatility
greater than 1.0, extractive agent will be recovered from the extactive distillation
step together with halocarbon, and may be further purified (e.g., by conventional
distillation) and recycled to the contacting step. For extractive agents causing HFC-32
and halocarbon relative volatility less than 1.0, extractive agent will be recovered
from the extractive distillation step together with HFC-32, and may be further purified
(e.g., by conventional distillation) and recycled to the contacting step leaving HFC-32
substantially free of halocarbon.
[0024] By substantially free or substantially pure, it is meant that the HFC-32 product
contains less than about 0.1 weight% halocarbon, and preferably less than about 50
parts per million by weight (ppmw) of halocarbon. Higher purity HFC-32 for use as
plasma etchant gas, e.g., containing 0.1 ppmw or less of halocarbon, may be produced
by the present extractive distillation process by varying the extractant flow and
distillation column dimensions.
[0025] While the present process may be used to purify a wide range of HFC-32 compositions
containing one or more of the present halocarbons, it is preferred that the HFC-32
content be greater than about 90 mole% and that the halocarbon content be less than
about 10 mole%. If desired, the aforementioned azeotropic distillation method can
be used for reducing the initial quantity of halocarbon and other impurities in the
HFC-32 composition. That is, conventional distillation can be used for removing relatively
large or bulk quantities of impurities from the first mixture which in turn is processed
in accordance with the inventive process for separating HFC-32 from halocarbon.
[0026] Extractive distillation is typically performed by operating a continuous distillation
column, which comprises a multi-stage distillation column with two feed points. Extractive
agent is introduced at a first feed point on the column which is located at the same
height, more preferably above, a second feed point that is used for introducing the
HFC-32/halocarbon mixture to be separated. The distillation column further comprises
a reboiler and an overhead condenser for returning reflux to the column.
[0027] In one embodiment of the present process, hydrocarbon extractive agent is introduced
at an upper feed point of an extractive distillation column, whereas the first mixture
requiring separation, e.g., comprising HFC-32 and halocarbon, is introduced at a relatively
lower point in the column. The hydrocarbon extractive agent passes downwardly through
trays in the column and contacts the first mixture thereby forming a second mixture.
While in the presence of the hydrocarbon extractive agent, HFC-32 is relatively more
volatile than halocarbon, thereby causing substantially pure HFC-32 to exit the top
of the column. HFC-32 exiting the top of the column can be condensed by reflux condensers.
At least a portion of this condensed stream can be returned to the top of the column
as reflux, and the remainder recovered as substantially pure HFC-32 product. Hydrocarbon
extractive agent, halocarbon, and other impurities comprise a third mixture that exits
from the bottom of the column, which can then be passed to a stripper or distillation
column for separation by using conventional distillation or other known methods. The
hydrocarbon extractive agent can be recycled to the extractive distillation column.
[0028] In another embodiment of the present process, oxygen-containing or chlorocarbon extractive
agent is introduced at an upper feed point of an extractive distillation column, whereas
the first mixture requiring separation, e.g., comprising HFC-32 and halocarbon, is
introduced at a relatively lower point in the column. The oxygen-containing or chlorocarbon
extractive agent passes downwardly through trays in the column and contacts the first
mixture thereby forming a second mixture. While in the presence of oxygen-containing
or chlorocarbon extractive agent, halocarbons are relatively more volatile than HFC-32,
thereby causing halocarbons to exit the top of the column. Oxygen-containing or chlorocarbon
extractive agent and substantially pure HFC-32 comprise a third mixture that exits
from the bottom of the column, which can in turn be passed to a stripper or distillation
column for separation by using conventional distillation or other known methods. The
oxygen-containing or chlorocarbon extractive agent can be recycled to the extractive
distillation column.
[0029] The ratio of the material exiting the top of the extractive distillation column,
which is then condensed and in turn returned to the column, to the amount of material
that is removed as product is commonly referred to as the reflux ratio. The reflux
ratio will define the physical characteristics of the extractive distillation column.
In general, an increase in the reflux ratio will in turn cause an increase in the
purity of the overhead stream (HFC-32 or halocarbon) by reducing or eliminating the
quantity of extractive agent and other impurities in the overhead stream.
[0030] The specific conditions that can be used for practicing the invention depend upon
a number of interrelated design parameters such as the diameter of the column, feed
point location on the column, and the number of separation stages in the column, among
other parameters. The operating pressure of the distillation system may range from
about 103 kPa (15 psia) to about 2413 kPa (350 psia), normally about 345 kPa (50 pisa)
to 2068 kPa (300 psia). The temperature and heat transfer area of the overhead condenser
is normally sufficient to substantially fully condense the overhead product, or is
optionally sufficient to achieve the desired reflux ratio by partial condensation.
[0031] The effective amount of extractive agent can vary widely. In general, increasing
the amount of extractive agent will increase the purity of the overhead HFC-32 or
halocarbon stream. Typically, the ratio of extractive agent to HFC-32 ranges from
about 1/1 to 10/1 on a weight basis; however, higher ratios can be employed.
[0032] The temperature that is employed at a given step in the inventive process may vary,
as column operating temperature is a function of the pressure and design characteristics
of the distillation column, e.g., the ratio of extractive agent to the first mixture.
[0033] The present inventive process can be better understood by reference to Figure 1.
Figure 1 schematically illustrates a system which can be used for performing the embodiment
of the present extractive distillation process wherein HFC-32 is separated from a
first mixture comprising HFC-32 and halocarbon using a hydrocarbon extractive agent.
[0034] A first mixture comprising HFC-32 and halocarbon impurity is supplied via conduit
1 to extraction column
2. At least one liquid hydrocarbon extractive agent is supplied via conduit
3 to the extraction column
2, and introduced into column
2 at a location above the mixture
1. A second mixture comprising the hydrocarbon extractive agent and halocarbon is removed
from the bottom of column
2 and transported to steam heated reboiler
4. In some cases, reboiler
4 is attached to extractive column
2. The second mixture is supplied via conduit
5 to a feed tank
6. Supplemental liquid hydrocarbon extractive agent is also supplied to feed tank
6 via conduit
7 thereby forming a hydrocarbon extractive agent recycle. A pump
8 transports the hydrocarbon extractive agent recycle to a stripping mixture column
9. Stripping column
9 separates the hydrocarbon extractive agent from other materials. Hydrocarbon extractive
agent is removed from column
9 and supplied to a second steam heated reboiler
10. In some cases, the reboiler
10 is attached to column
9. Pump
11 transports the hydrocarbon extractive agent from the reboiler
10 through a cold water chiller
12, and then to chiller
13. If necessary, excess quantities of hydrocarbon extractive agent can be purged prior
to reaching chiller
12. Typically, chiller
13 is operated at a temperature of about -25°C. After exiting chiller
13, the hydrocarbon extractive agent is supplied via conduit
3 into extraction column
2.
[0035] Halocarbon exits from the top of stripping column
9 as an off gas, and is introduced into condenser
14, which is typically operated at a temperature of about -25°C. While under reflux
conditions, pump
15 returns a portion of the halocarbon to the stripping column
9. The remaining portion of the halocarbon can be removed from the system via conduit
16.
[0036] An off gas of HFC-32 that is substantially free of halocarbon and other compounds
is removed from extraction column
2. The HFC-32 is transported via conduit
17 to condenser
18. Condenser
18 is typically operated at a temperature of about -25°C. While under reflux conditions,
pump
19 returns a portion of the HFC-32 to extraction column
2. The HFC-32 can be removed from the system via conduit
20.
EXAMPLES
[0037] The following Examples are provided to illustrate certain aspects of the present
invention, and do not limit the scope of the invention. In the following Examples,
each column stage is based upon a 100% operational or performance efficiency. Differing
column designs and operating conditions are employed using different extractive agents
in order to maximize the performance of each distillation. In all examples, the total
theoretical stages includes condenser and reboiler, with the condenser counted as
stage No. 1.
EXAMPLE 1
[0038] In this Example of the invention, a low boiler distillation column and an extractive
distillation column were used to purify a feed stream composed of 1.3 g/s (10 lb/hr)
of crude HFC-32. The crude feed contained 2.77x 10
-5 g/s (0.00022 lb/hr) of CFC-12, a CFC-12 concentration of 22 parts per million by
weight (ppmw), and 2.9x10
-4 g/s (0.00229 lb/hr) of HFC-143a, a HFC-143a concentration of 229 ppmw. Other feed
impurities were: 678 ppmw HFC-23 (CHF
3), 63 ppmw HFC-41 (CH
3F), 46 ppmw HCFC-22 (CHClF
2), 13 ppmw HCC-40 (CH
3Cl), 6 ppmw HFC-134a (CH
2FCF
3), 4 ppmw HFC-134 (CHF
2CHF
2), and 0.2 ppmw HFC-152a (CHF
2CH3). The low boiler column was a packed column containing 23 theoretical stages.
The crude feed stream was introduced at stage 12 of the low boiler column. The low
boiler column condenser pressure was maintained at 1310 kPa (190 psia). The distillate
temperature was 15°C and the bottom column temperature was 16°C. The low boiler column
boilup rate was set so as to give at least 5.04 g/s (40 lb/hr) of internal reflux
in the column (calculated based on condenser duty). The distillate takeoff rate was
controlled at 0.06 g/s (0.5 lb/hr). Under these conditions, the low boiling impurities
in the crude feed stream left the top of the low boiler column while the HFC-32 and
its near boiling and high boiling impurities left with the bottoms stream. A sample
of the bottoms stream indicated the following composition: 99.9785 wt% HFC-32, 172
ppmw HFC-143a, 25 ppmw HCC-40, 12 ppmw HCFC-22, 5 ppmw HFC-134a, and 1 ppmw HFC-134.
[0039] The extractive distillation column was a packed column containing 54 theoretical
stages. The bottoms stream from the low boiler column was introduced at stage 33 of
the extractive distillation column and n-hexane extractive agent was introduced at
stage 13 at 18.9 g/s (150 lb/hr). The column condenser pressure was maintained at
584.0 kPa (84.7 psia). The distillate temperature was -9°C, and the bottom column
temperature was 110°C. Under these operating conditions, the HFC-32 product left in
the overhead stream from the column and the n-hexane containing HFC-143a exited in
the bottom stream. The extractive agent flow rate was set so as to meet a composition
of less than 25 ppmw of HFC-143a in the overhead HFC-32 product. The column boilup
rate of 3.5 g/s (28 lb/hr) of steam to the reboiler was set so as to give sufficient
reflux to meet a composition of less than 5 ppmw extractive agent in the HFC-32 overhead
product. The distillate rate was controlled to recover 1.1 g/s (9 lb/hr) of HFC-32
in the distillate overhead stream. The column diameter was chosen so as to have an
F-factor of 0.59 or below. HFC-32 of 99.998 wt% purity was recovered with 99.89 %
recovery of the HFC-32 fed to the extractive distillation column. The HFC-32 product
contained 16 ppmw of HFC-143a, 1 ppmw of HCC-40, and 2 ppmw of n-hexane.
EXAMPLE 2
[0040] In this Example of the invention, a low boiler distillation column and an extractive
distillation column were used to purify a feed stream composed of 2.5 g/s (20 lb/hr)
of crude HFC-32. The crude feed contained 1.9x10
-4 g/s (0.00148 lb/hr) of CFC-12, a CFC-12 concentration of 74 parts per million by
weight (ppmw), and 3.4x10
-4 g/s (0.00270 lb/hr) of HFC 143a, a HFC-143a concentration of 135 ppmw. Other feed
impurities were: 31 ppmw n-hexane (C
6H
14), 21 ppmw HCFC-22 (CHClF
2), 7 ppmw HCC-40 (CH
3Cl), 1 ppmw HFC-134a (CH
2FCF
3), and 1 ppmw CFC-13 (CClF
3). The low boiler column was a packed column containing 23 theoretical stages. The
crude feed stream was introduced at stage 12 of the low boiler column. The low boiler
column condenser pressure was maintained at 1310 kPa (190 psia). The distillate temperature
was 15°C and the bottom column temperature was 16°C. The low boiler column boilup
rate was set so as to give at least 5.0 g/s (40 lb/hr) of internal reflux in the column
(calculated based on condenser duty). The distillate takeoff rate was controlled at
0.03 g/s (0.2 lb/hr). Under these conditions, the low boiling impurities in the crude
feed stream left the top of the low boiler column while the HFC-32 and its near boiling
and high boiling impurities left with the bottoms stream. A sample ofthe bottoms stream
indicated the following composition: 99.9823 wt% HFC-32, 121 ppmw HFC-143a, 24 ppmw
n-hexane, 20 ppmw HCFC-22, 7 ppmw HCC-40, and 5 ppmw CFC-12.
[0041] The extractive distillation column was a packed column containing 54 theoretical
stages. The bottoms from the low boiler column was introduced at stage 33 of the extractive
distillation column and the n-hexane extractive agent was introduced at stage 13 at
18.9 g/s (150 lb/hr). The column condenser pressure was maintained at 584.0 kPa (84.7
psia). The distillate temperature was -9°C, and the bottom column temperature was
120°C. Under these operating conditions, the HFC-32 product left in the overhead stream
from the column and the n-hexane containing CFC-12 and HFC-143a exited in the bottom
stream. The extractive agent flow rate was set so as to meet a composition of less
than 40 ppmw of HFC-143a in the overhead HFC-32 product. The column boilup rate of
3.5 g/s (28 lb/hr) of steam to the reboiler was set so as to give sufficient reflux
to meet a composition of less than 5 ppmw extractive agent in the HFC-32 overhead
product. The distillate rate was controlled to recover 2.5 g/s (19.5 lb/hr) of HFC-32
in the distillate overhead stream. The column diameter was chosen so as to have an
F-factor of 0.59 or below. HFC-32 of 99.9964 wt% purity was recovered with 98.75 %
recovery of HFC-32 fed to the extractive distillation column. The HFC-32 product contained
30 ppmw of HFC-143a and 6 ppmw of other unknown impurities; CFC-12 was below detectable
limits in the product.
Examples 3-16 Comparative Examples 1-4
[0042] The following examples are calculated, theoretical examples employing the aforementioned
NRTL interaction parameters. The examples are based on 126.0 g/s (1000 lb/hr) of crude
HFC-32 feed containing selected halocarbon impurities. No other impurities were considered
to be present in the feed. Also included are calculated, theoretical Comparative Examples
employing the aforementioned NRTL interaction parameters.
Table 11 -
| Removal of CFC-12 and HFC-143a from HFC-32 using n-Pentane as Extractive Agent |
| |
Example 9 |
Example 10 |
Example 11 |
| Process Feed, g/s (lb/hr) |
126.6
(1,000) |
126.6
(1,000) |
126.6
(1,000) |
| HFC-32 (wt%) |
99.99 |
99.99 |
99.98 |
| |
ppm
HFC-143a |
0 |
100 |
100 |
| |
CFC-12 |
100 |
0 |
100 |
| Total # Column Stages |
69 |
69 |
69 |
| Extractive Agent Feed Stage # |
36 |
36 |
36 |
| Process Stream Feed Stage # |
52 |
52 |
52 |
| Process Feed Temperature (°C) |
-15 |
-15 |
-15 |
| Extractant Feed Temperature (°C) |
-15 |
-15 |
-15 |
| Operating Pressure, kPa (psia) |
584.0
(84.7) |
584.0
(84.7) |
584.0
(84.7) |
| Distillate Temperature (°C) |
-9.9 |
-9.9 |
-9.9 |
| Bottoms Temperature (°C) |
99.4 |
100.5 |
100.5 |
| Q Condenser, J/s (pcu/hr) |
-232.6
(-440,900) |
-232.6
(-440,900) |
-232.6
(-440,900) |
| Q Reboiler, J/s (pcu/hr) |
277.6
(526,300) |
419.8
(795,800) |
419.8
(795,800) |
| Reflux Flow, g/s (lb/hr) |
554.4
(4,400) |
554.4
(4,400) |
554.4
(4,400) |
| Extractive Agent Flow, g/s (lb/hr) |
159.3
(1,264) |
668.0
(5,302) |
668.0
(5,302) |
| HFC-32 Purity (wt%) |
99.9994 |
99.9974 |
99.9974 |
| |
ppm
CFC-12 |
5 |
- |
0 |
| |
HFC-143a |
- |
25 |
25 |
| |
n-Pentane |
1 |
1 |
1 |
| % of HFC-32 Feed Recovered |
99.8 |
99.8 |
99.8 |

1. Verfahren zum Trennen von Difluormethan (HFC-32) von mindestens einem Halogenkohlenstoff
einer ersten Mischung, umfassend Difluormethan (HFC-32) und Halogenkohlenstoff, ausgewählt
aus der Gruppe, bestehend aus Dichlordifluormethan (CFC-12), 1,1,1-Trifluorethan (HFC-143a),
Chlorpentafluorethan (CFC-115) und Pentafluorethan (HFC-125), umfassend die Stufen
von:
in Kontakt bringen der erste Mischung mit einem Extraktionsmittel, ausgewählt aus
der Gruppe, bestehend aus:
Kohlenwasserstoffextraktionsmitteln, umfassend Kohlenwasserstoffe mit 5 bis 9 Kohlenstoffatomen
und mit einem normalen Siedepunkt größer als etwa 30°C und geringer als etwa 155°C,
Sauerstoff enthaltenden Extraktionsmitteln, umfassend Alkohole mit einem normalen
Siedepunkt größer als etwa 60°C und geringer als etwa 100°C und dargestellt durch
die Formel CxH2x+1OH, wobei x von 1 bis 3 ist, und Ketone mit einem normalen Siedepunkt größer als etwa
50°C und geringer als etwa 110°C und dargestellt durch die Formel CyH2y+1COCzH2z+1, wobei y und z 1 oder größer sind, und y+z ist höchstens 5, und
Chlorkohlenstoffextraktionsmitteln, umfassend Chlorkohlenstoffe mit einem normalen
Siedepunkt größer als etwa 39°C und geringer als etwa 150°C und dargestellt durch
die Formel CsH2s+2-tClt, wobei s 1 oder 2 ist, und t 2 bis 4 ist, unter Bildern einer zweiten Mischung,
Trennen von Difluormethan (HFC-32) von mindestens einem Halogenkohlenstoff der zweiten
Mischung durch extraktives Destillieren der zweiten Mischung, und
Gewinnen von Difluormethan (HFC-32) im wesentlichen frei von mindestens einem Halogenkohlenstoff,
unter der Voraussetzung, daß wenn der Halogenkohlenstoff Pentaflurethan (HFC-125)
ist, das Chlorkohlenstoffextraktionsmittel nicht Methylenchlorid sein kann.
2. Verfahren nach Anspruch 1, wobei das Kohlenwasserstoffextraktionsmittel ausgewählt
wird aus der Gruppe, bestehend aus Kohlenwasserstoffen mit 5 bis 7 Kohlenstoffatomen
und mit einem normalen Siedepunkt größer als etwa 30°C und geringer als etwa 110°C.
3. Verfahren nach Anspruch 2, wobei das Kohlenwasserstoffextraktionsmittel ausgewählt
wird aus der Gruppe, bestehend aus n-Pentan, 2-Methylpentan, 3-Methylpentan, Cyclopentan,
Methylcyclopentan, n-Hexan, Cyclohexan und n-Heptan.
4. Verfahren nach Anspruch 1, wobei das Sauerstoff enthaltende Extraktionsmittel ausgewählt
wird aus der Gruppe, bestehend aus Methanol, Ethanol, Propanol, isoPropanol, Propanon
und Butanon.
5. Verfahren nach Anspruch 1, wobei das Chlorkohlenstoffextraktionsmittel Methylenchlorid
ist.
6. Verfahren nach Anspruch 1, ferner umfassend Variieren des Extraktionsmittelflusses
und Destillationssäulendimensionen, wodurch das Difluormethan (HFC-32), gewonnen von
der zweiten Mischung, weniger als etwa 0,1 ppmG Halogenkohlenstoff enthält.
7. Verfahren nach Anspruch 1, ferner umfassend im Kreislauf führen mindestens eines Teils
des Extraktionsmittels, erhalten aus der Extraktionsdestillation der Trennstufe, für
Verwendung bei Herstellung der zweiten Mischung der in Kontaktbringungsstufe.
8. Verfahren nach Anspruch 1, wobei die Extraktionsdestillation bei einem Druck von 103
kPa bis 2413 kPa (15 bis 350 psia) durchgeführt wird.
9. Verfahren nach Anspruch 1, wobei die Extraktionsdestillation unter Verwenden eines
Rückflußverhältnissses von etwa 1/1 bis etwa 10/1 durchgeführt wird.
10. Verfahren nach Anspruch 1, wobei das Difluormethan (HFC-32) und Halogenkohlenstoff
der ersten Mischung eine azeotrope Zusammensetzung sind.