| (84) |
Designated Contracting States: |
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AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE |
| (30) |
Priority: |
12.08.1997 US 55466 P 14.08.1997 US 55759 P 26.06.1998 US 105538 26.06.1998 US 105539
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| (71) |
Applicants: |
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- UNIVERSITY OF SOUTHERN CALIFORNIA
Los Angeles, CA 90007-4344 (US)
- Fraunhofer Institut Siliziumtechnologie
25524 Itzehoe (DE)
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| (72) |
Inventors: |
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- MACPHEE, Robert, D.Univ. of Southern California
Los Angeles, CA 90033 (US)
- TAYLOR, Clive, R.Univ. of Southern California
Los Angeles, CA 90033 (US)
- HINTSCHE, RainerFraunhofer Institut
D-25524 Itzehoe (DE)
- SEITZ, ReneFraunhofer Institut
D-25524 Itzehoe (DE)
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| (74) |
Representative: Viering, Jentschura & Partner |
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Postfach 22 14 43 80504 München 80504 München (DE) |
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