(19)

(11)

EP 1 004 136 A1

(12)

(43) Date of publication: 31.05.2000 Bulletin 2000/22 (21) Application number: 99926627.3 (22) Date of filing: 16.06.1999

(51) International Patent Classification (IPC)7: H01J 37/32 (86) International application number: PCT/GB9901/913 (87) International publication number: WO 9966/531 (23.12.1999 Gazette 1999/51)

(84) Designated Contracting States: AT BE CH DE DK ES FI FR GB IE IT LI NL SE (30) Priority: 16.06.1998 GB 9812852 (71) Applicant: Surface Technology Systems Limited Gwent,Wales NP1 9UJ (GB)	(72) Inventors: BHARDWAJ, Jyoti, Kiron Bristol BS12 0BH (GB) LEA, Leslie, Michael Didcot. OX11 9JH (GB) (74) Representative: James, Michael John Gwynne et al Wynne-Jones, Lainé & James22, Rodney Road CheltenhamGloucestershire GL50 1JJ CheltenhamGloucestershire GL50 1JJ (GB)