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(11)

EP 1 007 759 A1

(12)

(43) Date of publication: 14.06.2000 Bulletin 2000/24 (21) Application number: 98939263.4 (22) Date of filing: 06.08.1998

(51) International Patent Classification (IPC)7: C23C 14/40, H01J 37/34, H01J 37/32 (86) International application number: PCT/US9816/395 (87) International publication number: WO 9907/913 (18.02.1999 Gazette 1999/07)

(84) Designated Contracting States: DE GB NL (30) Priority: 07.08.1997 US 908341 07.08.1997 US 908342 (71) Applicant: APPLIED MATERIALS, INC. Santa Clara,California 95054-3299 (US)	(72) Inventors: GOPALRAJA, Praburam Sunnyvale, CA 94089 (US) FORSTER, John, C. San Francisco, CA 94103 (US) XU, Zheng Foster City, CA 94404 (US) STIMSON, Bardley, O. San Jose, CA 95126 (US) (74) Representative: Cross, Rupert Edward Blount et al BOULT WADE TENNANT,27 Furnival Street London EC4A 1PQ London EC4A 1PQ (GB)