MICRO-ELECTRO-MECHANICAL INTEGRATED CONTROL SYSTEMS - Patent 1012683

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EP 1 012 683 A2

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(88)	Date of publication A3:
	29.04.1999

(43)	Date of publication:
	28.06.2000 Bulletin 2000/26

(21)	Application number: 98944433.6

(22)	Date of filing: 07.08.1998

(51)	International Patent Classification (IPC)⁷: G05B 23/02

(86)	International application number:
	PCT/US9816/490

(87)	International publication number:
	WO 9908/168 (18.02.1999 Gazette 1999/07)

(84)	Designated Contracting States:
	AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

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Priority:

07.08.1997 US 54951 P

(71)	Applicant: De Schrijver, Stefaan A.
	Newton, MA 02159 (US)

(72)	Inventor:
	De Schrijver, Stefaan A. Newton, MA 02159 (US)

(74)	Representative: Naismith, Robert Stewart et al
	CRUIKSHANK & FAIRWEATHER19 Royal Exchange Square Glasgow, G1 3AEScotland Glasgow, G1 3AEScotland (GB)

(54)	MICRO-ELECTRO-MECHANICAL INTEGRATED CONTROL SYSTEMS