(19)

(11)

EP 1 018 156 A1

(12)

(43) Date of publication: 12.07.2000 Bulletin 2000/28 (21) Application number: 98912851.7 (22) Date of filing: 23.03.1998

(51) International Patent Classification (IPC)7: H01L 21/763 // H01L21/762 (86) International application number: PCT/SE9800/528 (87) International publication number: WO 9843/293 (01.10.1998 Gazette 1998/39)

(84) Designated Contracting States: DE ES FI FR GB IT NL SE (30) Priority: 26.03.1997 SE 9701154 (71) Applicant: TELEFONAKTIEBOLAGET L M ERICSSON (publ) 126 25 Stockholm (SE)	(72) Inventors: SÖDERBÄRG, Anders, Karl, Sivert S-756 45 Uppsala (SE) ÖGREN, Nils, Ola S-162 46 Vällingby (SE) SJÖDIN, Ernst, Hakan S-741 42 Knivsta (SE) ZACKRISSON, Olof, Mikael S-762 95 Rimbo (SE) (74) Representative: Hedberg, Sten Torsten  Ericsson Microelectronics AB 164 81 Kista-Stockholm 164 81 Kista-Stockholm (SE)