(19)

(11)

EP 1 019 703 A1

(12)

(43) Date of publication: 19.07.2000 Bulletin 2000/29 (21) Application number: 98948466.2 (22) Date of filing: 23.09.1998

(51) International Patent Classification (IPC)7: G01N 21/45, G01B 9/02 (86) International application number: PCT/US9819/855 (87) International publication number: WO 9918/424 (15.04.1999 Gazette 1999/15)

(84) Designated Contracting States: DE NL (30) Priority: 02.10.1997 US 942848 (71) Applicant: ZYGO CORPORATION MiddlefieldConnecticut 06455-0448 (US)	(72) Inventor: HILL, Henry, Allen Tucson, AZ 85716 (US) (74) Representative: Cole, David John  Executive Liaison Services,43 Mount Felix Walton-on-ThamesSurrey KT12 2PJ Walton-on-ThamesSurrey KT12 2PJ (GB)