(19)
(11) EP 1 021 265 A1

(12)

(43) Date of publication:
26.07.2000 Bulletin 2000/30

(21) Application number: 98933058.4

(22) Date of filing: 01.07.1998
(51) International Patent Classification (IPC)7B22F 3/14
(86) International application number:
PCT/US9813/719
(87) International publication number:
WO 9902/288 (21.01.1999 Gazette 1999/03)
(84) Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

(30) Priority: 11.07.1997 US 52262 P
01.07.1998 US 

(71) Applicant: JOHNSON MATTHEY ELECTRONICS INC
Spokane,Washington 99216 (US)

(72) Inventors:
  • SHAH, Ritesh, P.
    Liberty Lake, WA 99019 (US)
  • MORALES, Diana, L.
    Veradale, WA 99037 (US)
  • KELLER, Jeffrey, A.
    Spokane, WA 99202 (US)

(74) Representative: Lawrence, John Gordon et al
McNeight & LawrenceRegent HouseHeaton Lane
Stockport, Cheshire SK4 1BS
Stockport, Cheshire SK4 1BS (GB)

   


(54) INTERMETALLIC ALUMINIDES AND SILICIDES SPUTTERING TARGETS, AND METHODS OF MAKING SAME