(19)

(11)

EP 1 021 588 A1

(12)

(43) Date of publication: 26.07.2000 Bulletin 2000/30 (21) Application number: 98934511.1 (22) Date of filing: 14.07.1998

(51) International Patent Classification (IPC)7: C23C 16/00 (86) International application number: PCT/US9814/525 (87) International publication number: WO 9904/060 (28.01.1999 Gazette 1999/04)

(84) Designated Contracting States: AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE (30) Priority: 14.07.1997 US 52442 P (71) Applicant: ADVANCED TECHNOLOGY MATERIALS, INC. Danbury, CT 06810 (US)	(72) Inventor: STURM, Edward, A. New Milford, CT 06776 (US) (74) Representative: Gee, Steven William  1 South Lynn Gardens,London Road Shipston on Stour,Warwickshire CV36 4ER Shipston on Stour,Warwickshire CV36 4ER (GB)