METHOD OF MAKING A STRUCTURE WITH IMPROVED MATERIAL PROPERTIES BY MODERATE HEAT TREATMENT OF A METAL DEPOSIT - Patent 1023469

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EP 1 023 469 A1

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(43)	Date of publication:
	02.08.2000 Bulletin 2000/31

(21)	Application number: 98930127.0

(22)	Date of filing: 11.06.1998

(51)	International Patent Classification (IPC)⁷: C25D 7/00, H01L 23/48

(86)	International application number:
	PCT/US9812/094

(87)	International publication number:
	WO 9914/404 (25.03.1999 Gazette 1999/12)

(84)	Designated Contracting States:
	DE FR GB IT

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Priority:

17.09.1997 US 931923

(71)	Applicant: FORMFACTOR, INC.
	Livermore, CA 94550 (US)

(72)	Inventors:
	CHEN, Jimmy, Kuo-Wei Pleasanton, CA 94566 (US) ELDRIDGE, Benjamin, N. Danville, CA 94526 (US) DOZIER, Thomas, H. Livermore, CA 94550 (US) YEH, Junjye, J. Livermore, CA 94550 (US) HERMAN, Gayle, J. Danville, CA 94506 (US) KHANDROS, Igor, Y. Orinda, CA 94563 (US)

(74)	Representative: Kahler, Kurt, Dipl.-Ing. et al
	PatentanwälteKahler, Käck, Fiener et col.,Vorderer Anger 268 86899 Landsberg/Lech 86899 Landsberg/Lech (DE)

(54)	METHOD OF MAKING A STRUCTURE WITH IMPROVED MATERIAL PROPERTIES BY MODERATE HEAT TREATMENT OF A METAL DEPOSIT