(19)
(11) EP 1 023 819 A2

(12)

(88) Date of publication A3:
22.10.1999

(43) Date of publication:
02.08.2000 Bulletin 2000/31

(21) Application number: 98953418.5

(22) Date of filing: 13.10.1998
(51) International Patent Classification (IPC)7H05H 1/00
(86) International application number:
PCT/US9821/534
(87) International publication number:
WO 9920/087 (22.04.1999 Gazette 1999/16)
(84) Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

(30) Priority: 14.10.1997 US 61941 P

(71) Applicant: ADVANCED ENERGY INDUSTRIES, INC.
Fort Collins, CO 80525 (US)

(72) Inventors:
  • DRUMMOND, Geoffrey, D.
    Fort Collins, CO 80526 (US)
  • MCDONOUGH, George
    Loveland, CO 80537 (US)
  • SCHOLL, Richard, A.
    Fort Collins, CO 80526 (US)
  • KERR, Tim
    Fort Collins, CO 80526 (US)
  • HARPOLD, John, G.
    Bellvue, CO 80512 (US)

(74) Representative: Kador & Partner 
Corneliusstrasse 15
80469 München
80469 München (DE)

   


(54) SYSTEM FOR PLASMA IGNITION BY FAST VOLTAGE RISE