(19)
(11) EP 1 024 882 A1

(12)

(43) Date of publication:
09.08.2000 Bulletin 2000/32

(21) Application number: 98946619.8

(22) Date of filing: 09.10.1998
(51) International Patent Classification (IPC)7B01D 53/32, B01D 53/92, B01J 19/08
(86) International application number:
PCT/GB9803/059
(87) International publication number:
WO 9920/373 (29.04.1999 Gazette 1999/17)
(84) Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI MC NL PT SE

(30) Priority: 22.10.1997 GB 9722173

(71) Applicant: AEA Technology plc
Didcot,Oxfordshire OX11 0RA (GB)

(72) Inventors:
  • WEEKS, David, Michael
    Abingdon,Oxfordshire OX13 5DB (GB)
  • SEGAL, David, Leslie
    Abingdon,Oxfordshire OX14 3AB (GB)

(74) Representative: Lofting, Marcus John 
Patents Department,AEA Technology plc,329 Harwell
Didcot, Oxfordshire OX11 0RA
Didcot, Oxfordshire OX11 0RA (GB)

   


(54) DEVICE FOR PLASMA PROCESSING OF GASES