INTRODUCING PROCESS FLUID OVER ROTATING SUBSTRATES - Patent 1025279

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EP 1 025 279 A1

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(43)	Date of publication:
	09.08.2000 Bulletin 2000/32

(21)	Application number: 98950922.9

(22)	Date of filing: 05.10.1998

(51)	International Patent Classification (IPC)⁷: C23C 16/44, H01L 21/00, C30B 25/14

(86)	International application number:
	PCT/US9820/951

(87)	International publication number:
	WO 9919/536 (22.04.1999 Gazette 1999/16)

(84)	Designated Contracting States:
	DE FR GB

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Priority:

10.10.1997 US 948537

(71)	Applicant: Applied Materials, Inc.
	Santa Clara,California 95054 (US)

(72)	Inventors:
	HAAS, Brian, L. San Jose, CA 95118 (US) TIETZ, James, V. Fremont, CA 94536 (US) WILLIAMS, Meredith, J. Santa Clara, CA 95056 (US)

(74)	Representative: Cross, Rupert Edward Blount et al
	BOULT WADE TENNANT,Verulam Gardens70 Gray's Inn Road London WC1X 8BT London WC1X 8BT (GB)

(54)	INTRODUCING PROCESS FLUID OVER ROTATING SUBSTRATES