(19)
(11) EP 1 026 499 B8

(12) CORRECTED EUROPEAN PATENT SPECIFICATION
Note: Bibliography reflects the latest situation

(15) Correction information:
Corrected version no 1 (W1 B1)

(48) Corrigendum issued on:
01.03.2006 Bulletin 2006/09

(45) Mention of the grant of the patent:
07.12.2005 Bulletin 2005/49

(21) Application number: 99117412.9

(22) Date of filing: 07.09.1999
(51) International Patent Classification (IPC): 
G01N 21/88(1980.01)

(54)

Inspection system

Inspektionssystem

Système d'inspection

(84) Designated Contracting States:
DE

(30) Priority: 04.02.1999 JP 2791999

(43) Date of publication of application:
09.08.2000 Bulletin 2000/32

(73) Proprietor: Keyence Corporation
Osaka-shi, Osaka 533-8555 (JP)

(72) Inventors:
  • Inagaki, Daisuke, c/o Keyence Corporation
    Osaka-shi, Osaka 533-8555 (JP)
  • Ikushima, Yasuhisa, c/o Keyence Corporation
    Osaka-shi, Osaka 533-8555 (JP)

(74) Representative: HOFFMANN EITLE 
Patent- und Rechtsanwälte Arabellastrasse 4
81925 München
81925 München (DE)


(56) References cited: : 
EP-A- 0 159 364
GB-A- 2 238 151
 WO-A-98/22909
   
       
    Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).